Virtual coherence scanning interferometer for surface measurement

2021 ◽  
Author(s):  
Rong Su ◽  
Richard K. Leach
Keyword(s):  
Surface Measurement ◽  
Scanning Interferometer

scholarly journals Vibration compensating beam scanning interferometer for surface measurement

2008 ◽  
Vol 47 (7) ◽  
pp. 888 ◽  
Author(s):  
Haydn Martin ◽  
Kaiwei Wang ◽  
Xiangqian Jiang
Keyword(s):  
Surface Measurement ◽  
Beam Scanning ◽  
Scanning Interferometer

Surface measurement puzzle[ellipsis (horizontal)] the authors reply

1978 ◽  
Vol 57 (4) ◽  
pp. 10
Author(s):  
A. Harvie ◽  
J.S. Beattie
Keyword(s):  
Surface Measurement

Surface measurement puzzle[ellipsis (horizontal)]

1978 ◽  
Vol 57 (4) ◽  
pp. 10
Author(s):  
T.R. Thomas ◽  
H.C. Ward
Keyword(s):  
Surface Measurement

scholarly journals Data-Driven Intelligent 3D Surface Measurement in Smart Manufacturing: Review and Outlook

Machines ◽  
2021 ◽  
Vol 9 (1) ◽  
pp. 13
Author(s):  
Yuhang Yang ◽  
Zhiqiao Dong ◽  
Yuquan Meng ◽  
Chenhui Shao
Keyword(s):  
High Resolution ◽  
High Performance ◽  
Sampling Design ◽  
Three Dimensional ◽  
Measurement Data ◽  
Data Driven ◽  
Surface Measurement ◽  
Smart Manufacturing ◽  
Future Research ◽  
3D Surface

High-fidelity characterization and effective monitoring of spatial and spatiotemporal processes are crucial for high-performance quality control of many manufacturing processes and systems in the era of smart manufacturing. Although the recent development in measurement technologies has made it possible to acquire high-resolution three-dimensional (3D) surface measurement data, it is generally expensive and time-consuming to use such technologies in real-world production settings. Data-driven approaches that stem from statistics and machine learning can potentially enable intelligent, cost-effective surface measurement and thus allow manufacturers to use high-resolution surface data for better decision-making without introducing substantial production cost induced by data acquisition. Among these methods, spatial and spatiotemporal interpolation techniques can draw inferences about unmeasured locations on a surface using the measurement of other locations, thus decreasing the measurement cost and time. However, interpolation methods are very sensitive to the availability of measurement data, and their performances largely depend on the measurement scheme or the sampling design, i.e., how to allocate measurement efforts. As such, sampling design is considered to be another important field that enables intelligent surface measurement. This paper reviews and summarizes the state-of-the-art research in interpolation and sampling design for surface measurement in varied manufacturing applications. Research gaps and future research directions are also identified and can serve as a fundamental guideline to industrial practitioners and researchers for future studies in these areas.

scholarly journals Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 164
Author(s):  
Dongxu Wu ◽  
Fusheng Liang ◽  
Chengwei Kang ◽  
Fengzhou Fang
Keyword(s):  
Surface Reconstruction ◽  
Measurement Accuracy ◽  
Experimental Studies ◽  
Reconstruction Algorithm ◽  
Low Noise ◽  
Surface Measurement ◽  
Reconstruction Algorithms ◽  
Centroid Method ◽  
Envelope Detection ◽  
Vertical Scanning Interferometry

Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. However, the performance of a surface reconstruction algorithm in interferometric measurements is influenced by environmental disturbances and system noise. This paper presents a comparative analysis of three algorithms commonly used for coherence envelope detection in vertical scanning interferometry, including the centroid method, fast Fourier transform (FFT), and Hilbert transform (HT). Numerical analysis and experimental studies were carried out to evaluate the performance of different envelope detection algorithms in terms of measurement accuracy, speed, and noise resistance. Step height standards were measured using a developed interferometer and the step profiles were reconstructed by different algorithms. The results show that the centroid method has a higher measurement speed than the FFT and HT methods, but it can only provide acceptable measurement accuracy at a low noise level. The FFT and HT methods outperform the centroid method in terms of noise immunity and measurement accuracy. Even if the FFT and HT methods provide similar measurement accuracy, the HT method has a superior measurement speed compared to the FFT method.

scholarly journals Vicarious Radiometric Calibration of Ocean Color Bands for FY-3D/MERSI-II at Lake Qinghai, China

Sensors ◽  
2020 ◽  
Vol 21 (1) ◽  
pp. 139
Author(s):  
Shengli Chen ◽  
Xiaobing Zheng ◽  
Xin Li ◽  
Wei Wei ◽  
Shenda Du ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Large Deviation ◽  
Ocean Color ◽  
Calibration Method ◽  
Surface Measurement ◽  
Radiometric Calibration ◽  
Lake Qinghai ◽  
Vicarious Calibration ◽  
Calibration Methods ◽  
Spectral Imager

To calibrate the low signal response of the ocean color (OC) bands and test the stability of the Fengyun-3D (FY-3D)/Medium Resolution Spectral Imager II (MERSI-II), an absolute radiometric calibration field test of FY-3D/MERSI-II at the Lake Qinghai Radiometric Calibration Site (RCS) was carried out in August 2018. The lake surface and atmospheric parameters were mainly measured by advanced observation instruments, and the MODerate spectral resolution atmospheric TRANsmittance algorithm and computer model (MODTRAN4.0) was used to simulate the multiple scattering radiance value at the altitude of the sensor. The results showed that the relative deviations between bands 9 and 12 are within 5.0%, while the relative deviations of bands 8, and 13 are 17.1%, and 12.0%, respectively. The precision of the calibration method was verified by calibrating the Aqua/Moderate-resolution Imaging Spectroradiometer (MODIS) and National Polar-orbiting Partnership (NPP)/Visible Infrared Imaging Radiometer (VIIRS), and the deviation of the calibration results was evaluated with the results of the Dunhuang RCS calibration and lunar calibration. The results showed that the relative deviations of NPP/VIIRS were within 7.0%, and the relative deviations of Aqua/MODIS were within 4.1% from 400 nm to 600 nm. The comparisons of three on-orbit calibration methods indicated that band 8 exhibited a large attenuation after launch and the calibration results had good consistency at the other bands except for band 13. The uncertainty value of the whole calibration system was approximately 6.3%, and the uncertainty brought by the field surface measurement reached 5.4%, which might be the main reason for the relatively large deviation of band 13. This study verifies the feasibility of the vicarious calibration method at the Lake Qinghai RCS and provides the basis and reference for the subsequent on-orbit calibration of FY-3D/MERSI-II.

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