scholarly journals Accelerated Surface Measurement Using Wavelength Scanning Interferometer with Compensation of Environmental Noise

Procedia CIRP ◽  
2013 ◽  
Vol 10 ◽  
pp. 70-76 ◽  
Author(s):  
H. Muhamedsalih ◽  
X. Jiang ◽  
F. Gao
Keyword(s):  
Environmental Noise ◽  
Surface Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

scholarly journals In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry

2012 ◽  
Vol 622-623 ◽  
pp. 357-360
Author(s):  
F. Gao ◽  
H. Muhamedsalih ◽  
X. Jiang
Keyword(s):  
Environmental Noise ◽  
Surface Measurement ◽  
Shop Floor ◽  
Discontinuous Surface ◽  
Process Measurement ◽  
Large Step ◽  
Wavelength Scanning ◽  
On Line ◽  
Filtering Technique ◽  
Surface Profiles

A wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces which is immune to environmental noise is introduced in this paper. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process. White light spectral scanning interferometry, together with an acousto-optic tuneable filtering technique, is used to measure both smooth surfaces and those with large step heights. An active servo control system is used to serve as a phase compensating mechanism to eliminate the effects of environmental noise. The system can be used for on-line or in-process measurement on a shop floor.

scholarly journals Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise

2010 ◽  
Vol 49 (15) ◽  
pp. 2903 ◽  
Author(s):  
Xiangqian Jiang ◽  
Kaiwei Wang ◽  
Feng Gao ◽  
Hussam Muhamedsalih
Keyword(s):  
Environmental Noise ◽  
Surface Measurement ◽  
Wavelength Scanning

scholarly journals Vibration compensating beam scanning interferometer for surface measurement

2008 ◽  
Vol 47 (7) ◽  
pp. 888 ◽  
Author(s):  
Haydn Martin ◽  
Kaiwei Wang ◽  
Xiangqian Jiang
Keyword(s):  
Surface Measurement ◽  
Beam Scanning ◽  
Scanning Interferometer

Error analysis on the phase calculation from superimposed interferograms generated by a wavelength scanning interferometer

1990 ◽  
Vol 77 (5-6) ◽  
pp. 343-348 ◽  
Author(s):  
Katsuyuki Okada ◽  
Hironobu Sakuta ◽  
Teruji Ose ◽  
Jumpei Tsujiuchi
Keyword(s):  
Error Analysis ◽  
Phase Calculation ◽  
Wavelength Scanning ◽  
Scanning Interferometer
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