Sacrificial ZnO templates for epitaxial lift-off of yttria-stabilised zirconia thin films

2021 ◽  
Author(s):  
David J. Rogers ◽  
Vinod E. Sandana ◽  
Ferechteh H. Teherani ◽  
Philippe Bove ◽  
Axel Courtois ◽  
...  
Keyword(s):  
Thin Films ◽  
Lift Off

Epitaxial Lift-off of Flexible Single-Crystal Magnetite Thin Films with Tunable Magnetic Performances by Mechanical Deformation

2021 ◽  
pp. 161470
Author(s):  
Weixiao Hou ◽  
Monteng Yao ◽  
Ruibin Qiu ◽  
Zhicheng Wang ◽  
Ziyao Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Single Crystal ◽  
Mechanical Deformation ◽  
Lift Off

Comparison between the Piezoresistive Properties of a-SiC Films Obtained by PECVD and Magnetron Sputtering

2011 ◽  
Vol 679-680 ◽  
pp. 217-220 ◽  
Author(s):  
Mariana A. Fraga
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Magnetron Sputtering ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Rf Magnetron Sputtering ◽  
Strain Gauges ◽  
Beam Bending ◽  
Lift Off ◽  
Sic Films

This work compares the piezoresistive properties of SiC thin films produced by two techniques enhanced by plasma, PECVD (plasma enhanced chemical vapor deposition) and RF magnetron sputtering. In order to study these properties, strain gauges based on SiC films produced were fabricated using photolithography techniques in conjunction with lift-off processes. The beam-bending method was used to characterize the SiC strain gauges fabricated.

Vanadium Dioxide Thin Films for Thermo-Optical Switching Applications

2003 ◽  
Vol 785 ◽  
Author(s):  
Lijun Jiang ◽  
William N. Carr
Keyword(s):  
Thin Films ◽  
Phase Transition ◽  
Vanadium Dioxide ◽  
Optical Switching ◽  
Abrupt Change ◽  
Metal Layer ◽  
Heating And Cooling ◽  
Optical Switching Devices ◽  
Lift Off ◽  
Vanadium Dioxide Thin Films

ABSTRACTVanadium dioxide (VO2) thin films were fabricated by e-beam evaporation of vanadium thin films followed by thermal oxidation in oxygen ambient. The properties of the VO2 films were investigated for thermo-optical switching applications. Synthesized VO2 film displays a phase transition at 65 – 68 °C. It exhibits an abrupt change in optical reflectivity over the phase transition temperature range. Results for VO2 on a highly reflective metal layer are strongly dependent on the VO2 thickness. The optical switching has a major hysteresis of about 15 °C between the heating and cooling branches. The evolution of the surface morphology with the oxidation time was studied with a SEM. The VO2 film was patterned on microplatforms by metal lift-off technique. We conclude that the evaporation followed by oxidation is an effective method to produce active VO2 film for thermo-optical switching devices.

Microstructures in BaTiO3 thin films by hydrothermal growth and lift-off technique

1999 ◽  
Vol 2 (4) ◽  
pp. 335-340 ◽  
Author(s):  
T Hoffmann ◽  
M Gültzow ◽  
C.M Sotomayor Torres ◽  
Th Doll ◽  
V.M Fuenzalida
Keyword(s):  
Thin Films ◽  
Hydrothermal Growth ◽  
Lift Off

Embossing of organic thin films using a surfactant assisted lift-off technique

2012 ◽  
Vol 387 (1) ◽  
pp. 175-179 ◽  
Author(s):  
Xin Zhang ◽  
Gengxin Zhang ◽  
Yen-Chih Liao ◽  
Brandon L. Weeks ◽  
Zhao Zhang
Keyword(s):  
Thin Films ◽  
Organic Thin Films ◽  
Lift Off ◽  
Surfactant Assisted

Self-powered flexible touch sensors based on PZT thin films using laser lift-off

2017 ◽  
Vol 261 ◽  
pp. 288-294 ◽  
Author(s):  
Myoung-Sub Noh ◽  
Sangtae Kim ◽  
Do-Kyung Hwang ◽  
Chong-Yun Kang
Keyword(s):  
Thin Films ◽  
Pzt Thin Films ◽  
Self Powered ◽  
Lift Off

Miniaturized Laser Power Sensor via Rapid Phototyping

2016 ◽  
Vol 879 ◽  
pp. 1721-1724
Author(s):  
Sylvio Schneider ◽  
Harald Beyer ◽  
Karsten Lange ◽  
Werner Bohmeyer ◽  
Mauro Casalboni ◽  
...  
Keyword(s):  
Thin Films ◽  
Rapid Prototyping ◽  
Laser Power ◽  
Cost Effective ◽  
Effective Generation ◽  
Power Sensor ◽  
Lift Off ◽  
Commercial Equipment

This work presents a photolithographic rapid prototyping process for producing thin films ("Rapid Phototyping"). This process allows a quick and cost-effective generation of scalable thermopile microstructures using commercial equipment and materials. Structural widths of 100x250μm can be produced reproducible in a lift-off process with an accuracy of 5 microns vertically and 30 microns horizontally.

Performance of Low Resistivity Electrode Prepared by Electroless Plated for Amorphous Silicon Thin-Film Transistors

2007 ◽  
Vol 561-565 ◽  
pp. 1165-1168 ◽  
Author(s):  
Chien Yie Tsay ◽  
Chung Kwei Lin ◽  
Hong Ming Lin ◽  
Shih Chieh Chang ◽  
Bor Chuan Chung
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Amorphous Silicon ◽  
Large Area ◽  
Silicon Thin Film ◽  
Adhesion Properties ◽  
Low Resistivity ◽  
N2 Atmosphere ◽  
Lift Off ◽  
Processing Steps

The TFTs array fabrication process for large-area TFT-LCD has been continuously developed for simplifying processing steps, improving performance and reducing cost in the process of mass production. In this study, the hydrogenated amorphous silicon (a-Si:H) TFTs with low resistivity electrodes , silver thin films, were prepared by using the selective deposition method that combined lift-off and electroless plated processes. This developed process can direct pattern the electrode of transistor devices without the etching process and provide ease processing steps. The as-deposited Ag films were annealed at 200 oC for 10 minutes under N2 atmosphere. The results shows that the adhesion properties can be enhanced and the resistivity has been improved from 6.0 μ,-cm, significantly decrease by 35%, of as-deposited Ag films by annealed. The thickness of Ag thin film is about 100 nm and the r. m. s roughness value is 1.54 nm. The a-Si:H TFT with Ag thin films as source and drain electrodes had a field effect mobility of 0.18 cm2/Vs, a threshold voltage of 2.65 V, and an on/off ratio of 3×104.

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