A novel and simple heterodyne interferometer scheme

Author(s):  
Yanfen Le ◽  
Shijialuo Jin ◽  
Tao Jin
2017 ◽  
Vol 76 (10) ◽  
pp. 903-918
Author(s):  
A. V. Varavin ◽  
G. P. Ermak ◽  
A. S. Vasilev ◽  
A. V. Fateev ◽  
N. V. Varavin ◽  
...  

2005 ◽  
Vol 16 (9) ◽  
pp. 1841-1847 ◽  
Author(s):  
Shuko Yokoyama ◽  
Toshiyuki Yokoyama ◽  
Tsutomu Araki

2014 ◽  
Vol 53 (4) ◽  
pp. 044104 ◽  
Author(s):  
Michael W. Kudenov ◽  
Matthew N. Miskiewicz ◽  
Michael J. Escuti ◽  
James F. Coward

Ultrasonics ◽  
2014 ◽  
Vol 54 (1) ◽  
pp. 402-407 ◽  
Author(s):  
Ping Yang ◽  
Guangzhen Xing ◽  
Longbiao He

2014 ◽  
Vol 613 ◽  
pp. 58-63
Author(s):  
Hai Jin Fu ◽  
Jiu Bin Tan ◽  
Peng Cheng Hu ◽  
Zhi Gang Fan

The heterodyne laser interferometer is widely applied in ultra-precision displacement measurement, but its accuracy is seriously restricted by the optical nonlinearity which arises from the optical mixing in the reference and measurement arms. In an ideal heterodyne laser interferometer, the beam from the laser source consists of two orthogonally linear-polarized components with slightly different optical frequencies and the two components can be completely separated by the polarizing optics, one traverses in the reference arm, the other traverses in the measurement arm, both of them are in the form of a pure optical frequency. However, in a real heterodyne laser interferometer, due to the imperfect laser polarization, the optics defect and the misalignment, the two components of the laser beam cant be perfectly separated, therefore both of the reference arm and the measurement arm contain a portion of the two laser components, which leads to an optical mixing in the two arms of the heterodyne interferometer and causes the cyclic nonlinearity of several to tens of nanometers.


2005 ◽  
Vol 295-296 ◽  
pp. 477-482
Author(s):  
K.W. Wang ◽  
Z.J. Cai ◽  
Li Jiang Zeng

A two-dimensional surface profile imaging technique based on heterodyne interferometer is proposed. A piezo translator vibrated grating is used to generate a heterodyne signal. A high speed CCD camera is used to extract the interference signal using a five step method. The uncertainty in the displacement measurement is approximately 0.035 µm within a measurement range of 1.7 µm, confirming the two dimensional heterodyne interferometer is valid for measuring the surface profile. The method is also available for low coherence heterodyne interferometer due to the optical frequency shifts caused by the vibration of grating independent on the wavelength.


Sign in / Sign up

Export Citation Format

Share Document