Controlled ALD doping of Er3+ for active on-chip waveguide amplifiers based on Al2O3
2020 ◽
Vol 26
(5)
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pp. 1-8
1992 ◽
Vol 139
(1)
◽
pp. 21
1994 ◽
Vol 04
(C4)
◽
pp. C4-277-C4-280
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2018 ◽
Vol 138
(1)
◽
pp. 41-49