Design and optimization of a novel resonant gauge pressure sensor

2020 ◽  
Author(s):  
Li Wang ◽  
Yuxiang Qiu ◽  
Xiangguang Han ◽  
Cuilan Chen ◽  
Mimi Huang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Design And Optimization ◽  
Gauge Pressure

Metal Strain Gauge Pressure Sensor Using SiO2/Si3N4 Diaphragm

2019 ◽  
Vol 139 (4) ◽  
pp. 63-68
Author(s):  
Hiroshi Nakano ◽  
Masahiro Matsumoto ◽  
Yasuo Onose ◽  
Kazuhiro Ohta
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Gauge Pressure ◽  
Metal Strain

Design and Optimization of a Highly Sensitive and Linearity Piezoresistive Pressure Sensor Based on a Combination of Cross Beam-Peninsula-Membrane Structure

2017 ◽  
Author(s):  
Tran Anh Vang ◽  
Xianmin Zhang ◽  
Benliang Zhu
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Single Crystal Silicon ◽  
High Sensitivity ◽  
Crystal Silicon ◽  
Nonlinearity Error ◽  
Trade Off ◽  
Design And Optimization ◽  
Piezoresistive Pressure Sensor ◽  
Piezoresistive Pressure Sensors

The sensitivity and linearity trade-off problem has become the hotly important issues in designing the piezoresistive pressure sensors. To solve these trade-off problems, this paper presents the design, optimization, fabrication, and experiment of a novel piezoresistive pressure sensor for micro pressure measurement based on a combined cross beam - membrane and peninsula (CBMP) structure diaphragm. Through using finite element method (FEM), the proposed sensor performances as well as comparisons with other sensor structures are simulated and analyzed. Compared with the cross beam-membrane (CBM) structure, the sensitivity of CBMP structure sensor is increased about 38.7 % and nonlinearity error is reduced nearly 8%. In comparison with the peninsula structure, the maximum non-linearity error of CBMP sensor is decreased about 40% and the maximum deflection is extremely reduced 73%. Besides, the proposed sensor fabrication is performed on the n-type single crystal silicon wafer. The experimental results of the fabricated sensor with CBMP membrane has a high sensitivity of 23.4 mV/kPa and a low non-linearity of −0.53% FSS in the pressure range 0–10 kPa at the room temperature. According to the excellent performance, the sensor can be applied to measure micro-pressure lower than 10 kPa.

Structure design and optimization of SOI high-temperature pressure sensor chip

2021 ◽  
pp. 105245
Author(s):  
Xin Tang ◽  
Junwang Tian ◽  
Jiafeng Zhao ◽  
Zhong Jin ◽  
Yunpeng Liu ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Structure Design ◽  
Sensor Chip ◽  
Design And Optimization

Design and optimization of a novel structural MEMS piezoresistive pressure sensor

2016 ◽  
Vol 23 (10) ◽  
pp. 4531-4541 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
R. Jagdheesh ◽  
José L. Ocaña
Keyword(s):  
Pressure Sensor ◽  
Design And Optimization ◽  
Piezoresistive Pressure Sensor

scholarly journals Design of an Integrated Anti-Hardening System for Carbon-In-Leach Tanks

2019 ◽  
Vol 19 (2) ◽  
pp. 64-69
Author(s):  
R. A. Ofosu ◽  
E. Normanyo ◽  
B. Essilfie-Nyame
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Light Emitting Diode ◽  
Density Measurement ◽  
Monitoring Systems ◽  
Light Emitting ◽  
Set Point ◽  
Gauge Pressure ◽  
Hardening System ◽  
Level Sensors

Slurry density monitoring is of paramount importance in the industrial world. Most industries, especially cement and mineral processing industries, employ this method to obtain good quality products. However, most Carbon-In-Leach (CIL) tanks of gold processing industries do not use slurry density monitoring systems. As a result, many a time, agitation difficulties occur when the slurry begins to harden. This paper, therefore, seeks to design an integrated anti-hardening system for CIL tanks, with the aid of a microcontroller, to monitor the density of the slurry in order to prevent it from hardening. Slurry density measurement was achieved with the help of a strain gauge pressure sensor and a couple of level sensors. Atmega 328p  microcontroller board was programmed to continuously compute the density of the slurry from values of pressure and level of slurry in the tank indicated by the pressure and level sensors, respectively. The microcontroller responds to slurry hardening by activating a light emitting diode and triggering the piezo buzzer when a set point is reached. The designed circuit was successfully simulated using Proteus 8.2 design suite software to ascertain its functionality. Based on the results obtained, the light emitting diode and piezo buzzer activated when the set point was reached. It was concluded that the anti-hardening system is effective for constantly monitoring the density of the slurry to prevent it from hardening. It was also recommended that the mining industries could employ the designed system to monitor the density in order to prevent hardening of slurry in CIL tanks. Keywords: Carbon-In-Leach Tanks, Slurry Densisty, Strain Guage Pressure Sensor, Microcontroller

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