Automated extraction of critical dimension from SEM images with Weave

2021 ◽  
Author(s):  
Leandro Medina ◽  
Bryan Sundahl ◽  
Roger T. Bonnecaze ◽  
Meghali Chopra
Keyword(s):  
Critical Dimension ◽  
Automated Extraction ◽  
Sem Images

scholarly journals Monte Carlo Simulation of CD-SEM Images for Linewidth and Critical Dimension Metrology

Scanning ◽  
2012 ◽  
Vol 35 (2) ◽  
pp. 127-139 ◽  
Author(s):  
Y. G. Li ◽  
P. Zhang ◽  
Z. J. Ding
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Critical Dimension ◽  
Sem Images

Analysis of Contrast Reversal in SEM Images

1972 ◽  
Vol 30 ◽  
pp. 398-399
Author(s):  
M. D. Coutts ◽  
E. R. Levin
Keyword(s):  
Incident Beam ◽  
Normal Incidence ◽  
Beam Current ◽  
Secondary Emission ◽  
Image Contrast ◽  
Sem Images ◽  
Secondary Electrons ◽  
Image Position

On tilting samples in an SEM, the image contrast between two elements, x and y often decreases to zero at θε, which we call the no-contrast angle. At angles above θε the contrast is reversed, θ being the angle between the specimen normal and the incident beam. The available contrast between two elements, x and y, in the SEM can be defined as,(1)where ix and iy are the total number of reflected and secondary electrons, leaving x and y respectively. It can easily be shown that for the element x,(2)where ib is the beam current, isp the specimen absorbed current, δo the secondary emission at normal incidence, k is a constant, and m the reflected electron coefficient.

Information capacity and bandwidth limitations in the SEM

1989 ◽  
Vol 47 ◽  
pp. 84-85
Author(s):  
D. C. Joy ◽  
R. D. Bunn
Keyword(s):  
Signal To Noise Ratio ◽  
Critical Dimension ◽  
Information Capacity ◽  
Acquisition Time ◽  
Signal To Noise ◽  
Sem Image ◽  
Probe Size ◽  
Minimum Number ◽  
Noise Ratio ◽  
Signal Channel

The information available from an SEM image is limited both by the inherent signal to noise ratio that characterizes the image and as a result of the transformations that it may undergo as it is passed through the amplifying circuits of the instrument. In applications such as Critical Dimension Metrology it is necessary to be able to quantify these limitations in order to be able to assess the likely precision of any measurement made with the microscope.The information capacity of an SEM signal, defined as the minimum number of bits needed to encode the output signal, depends on the signal to noise ratio of the image - which in turn depends on the probe size and source brightness and acquisition time per pixel - and on the efficiency of the specimen in producing the signal that is being observed. A detailed analysis of the secondary electron case shows that the information capacity C (bits/pixel) of the SEM signal channel could be written as :

Mosaic Mapping: A Means of Tiling Images to Shorten Acquisition Speed for Lower - Magnification SEM Images and Wavelength Dispersive Spectrometers (WDS) X-Ray Maps

1996 ◽  
Vol 54 ◽  
pp. 438-439
Author(s):  
J.D. Geller ◽  
C.R. Herrington
Keyword(s):  
Limiting Factors ◽  
X Rays ◽  
Angular Range ◽  
Acceptance Angle ◽  
Sem Images ◽  
Worst Case ◽  
X Ray ◽  
Focusing Distance ◽  
Layered Crystals ◽  
Working Distance

The minimum magnification for which an image can be acquired is determined by the design and implementation of the electron optical column and the scanning and display electronics. It is also a function of the working distance and, possibly, the accelerating voltage. For secondary and backscattered electron images there are usually no other limiting factors. However, for x-ray maps there are further considerations. The energy-dispersive x-ray spectrometers (EDS) have a much larger solid angle of detection that for WDS. They also do not suffer from Bragg’s Law focusing effects which limit the angular range and focusing distance from the diffracting crystal. In practical terms EDS maps can be acquired at the lowest magnification of the SEM, assuming the collimator does not cutoff the x-ray signal. For WDS the focusing properties of the crystal limits the angular range of acceptance of the incident x-radiation. The range is dependent upon the 2d spacing of the crystal, with the acceptance angle increasing with 2d spacing. The natural line width of the x-ray also plays a role. For the metal layered crystals used to diffract soft x-rays, such as Be - O, the minimum magnification is approximately 100X. In the worst case, for the LEF crystal which diffracts Ti - Zn, ˜1000X is the minimum.

vitreal cells and specialized phagocytes in the chick embryo retina: A TEM and SEM study

1990 ◽  
Vol 48 (3) ◽  
pp. 330-331
Author(s):  
M.A. Cuadros ◽  
M.J. Martinez-Guerrero ◽  
A. Rios
Keyword(s):  
Cell Death ◽  
Plasma Membrane ◽  
Acid Phosphatase ◽  
Chick Embryo ◽  
Basement Membrane ◽  
Sem Images ◽  
Intimate Contact ◽  
Cellular Processes ◽  
Sem Study ◽  
Free Cells

In the chick embryo retina (days 3-4 of incubation), coinciding with an increase in cell death, specialized phagocytes characterized by intense acid phosphatase activity have been described. In these preparations, all free cells in the vitreal humor (vitreal cells) were strongly labeled. Conventional TEM and SEM techniques were used to characterize them and attempt to determine their relationship with retinal phagocytes.Two types of vitreal cells were distinguished. The first are located at some distance from the basement membrane of the neuroepithelium, and are rounded, with numerous vacuoles and thin cytoplasmic prolongations. Images of exo- and or endocytosis were frequent; the cells showed a well-developed Golgi apparatus (Fig. 1) In SEM images, the cells was covered with short cellular processes (Fig. 3). Cells lying parallel to or alongside the basement membrane are elongated. The plasma membrane is frequently in intimate contact with the basement membrane. These cells have generally a large cytoplasmic expansion (Fig. 5).

Correlation of Pore Structure and Permeability by SEM-Image Analysis

1990 ◽  
Vol 48 (1) ◽  
pp. 428-429
Author(s):  
C. A. Callender ◽  
Wm. C. Dawson ◽  
J. J. Funk
Keyword(s):  
Image Analysis ◽  
Pore Structure ◽  
Imaging System ◽  
Pore Space ◽  
Simulation Models ◽  
Image Analyzer ◽  
Imaging Data ◽  
Sem Images ◽  
Thin Sections ◽  
Rock Types

The geometric structure of pore space in some carbonate rocks can be correlated with petrophysical measurements by quantitatively analyzing binaries generated from SEM images. Reservoirs with similar porosities can have markedly different permeabilities. Image analysis identifies which characteristics of a rock are responsible for the permeability differences. Imaging data can explain unusual fluid flow patterns which, in turn, can improve production simulation models.Analytical SchemeOur sample suite consists of 30 Middle East carbonates having porosities ranging from 21 to 28% and permeabilities from 92 to 2153 md. Engineering tests reveal the lack of a consistent (predictable) relationship between porosity and permeability (Fig. 1). Finely polished thin sections were studied petrographically to determine rock texture. The studied thin sections represent four petrographically distinct carbonate rock types ranging from compacted, poorly-sorted, dolomitized, intraclastic grainstones to well-sorted, foraminiferal,ooid, peloidal grainstones. The samples were analyzed for pore structure by a Tracor Northern 5500 IPP 5B/80 image analyzer and a 80386 microprocessor-based imaging system. Between 30 and 50 SEM-generated backscattered electron images (frames) were collected per thin section. Binaries were created from the gray level that represents the pore space. Calculated values were averaged and the data analyzed to determine which geological pore structure characteristics actually affect permeability.

High throughput semi-automated extraction method for the creation of a collection from microbial fermentations of fungi and Actinomycetes

Planta Medica ◽  
2008 ◽  
Vol 74 (09) ◽  
Author(s):  
JR Tormo ◽  
N Tabanera ◽  
D Conway ◽  
P Ramos ◽  
A Redondo ◽  
...  
Keyword(s):  
High Throughput ◽  
Extraction Method ◽  
Automated Extraction ◽  
The Creation
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