Thin-film flip-chip UVB LEDs enabled by electrochemical etching

Author(s):  
Michael A. Bergmann ◽  
Johannes Enslin ◽  
Martin Guttmann ◽  
Luca Sulmoni ◽  
Neysha Lobo-Ploch ◽  
...  
2020 ◽  
Vol 116 (12) ◽  
pp. 121101 ◽  
Author(s):  
Michael A. Bergmann ◽  
Johannes Enslin ◽  
Filip Hjort ◽  
Tim Wernicke ◽  
Michael Kneissl ◽  
...  

Author(s):  
Peian Li ◽  
Xu Zhang ◽  
Wing Cheung Chong ◽  
Kei May Lau

2009 ◽  
Vol 6 (1) ◽  
pp. 6-12 ◽  
Author(s):  
Arne Albertsen ◽  
Koji Koiwai ◽  
Kyoji Kobayashi ◽  
Tomonori Oguchi ◽  
Katsumi Aruga

This paper highlights the possible combination of technologies such as thick film screen printing, ink jet, and post-firing thin film processes in conjunction with laser-drilled fine vias to produce high-density, miniaturized LTCC substrates. To obtain the silver pattern on the inner layers, both conventional thick film printing and ink jet printing (using nano silver particle dispersed ink) were applied on the ceramic green sheets. The ink jet process made it possible to metallize fine lines with line/space = 30/30 μm. For interlayer connections, fine vias of 30 μm in diameter formed by UV laser were used. Then these sheets were stacked on top of each other and fired to obtain a base substrate. On this base substrate, fine copper patterns for flip chip mounting were formed by a thin film process. The surface finish consisted of a nickel passivation and a gold layer deposited by electroless plating. The combination of the three patterning processes for conducting traces and UV laser drilling of fine vias make it appear possible to realize fine pitch LTCC, for example, for flip chip device mounting.


2015 ◽  
Vol 2015 (1) ◽  
pp. 000799-000805
Author(s):  
Marek Gorywoda ◽  
Rainer Dohle ◽  
Bernd Kandler ◽  
Bernd Burger

Electromigration comprises one of the processes affecting the long-term reliability of electronic devices; it has therefore been the focus of many investigations in recent years. In regards to flip chip packaging technology, the majority of published data is concerned with electromigration in solder connections to metallized organic substrates. Hardly any information is available in the literature on electromigration in lead-free solder connections on thin film ceramic substrates. This work presents results of a study of electromigration in lead-free (SAC305) flip chip solder bumps with a nominal diameter of 40 μm or 30 μm with a pitch of 100 μm on silicon chips assembled onto thin film Al2O3 ceramic substrates. The under bump metallization (UBM) comprised of a 5 μm thick electroless nickel immersion gold (ENIG) layer directly deposited on the AlCu0.5 trace. The ceramic substrates were metallized using a thin film multilayer (NiCr-Au(1.5 μm)-Ni(2 μm) structure on the top of which wettable areas were produced with high precision by depositing flash Au (60 nm) of the required diameter (40 μm or 30 μm). All electromigration tests were performed at the temperature of 125 °C. Initially, one chip assembly with 40 μm and one with 30 μm solder bumps was loaded with the current density of 8 kA/cm2 for 1,000 h. The assemblies did not fail and an investigation with SEM revealed no significant changes to the microstructure of the bumps. Thereafter seven chip assemblies with 40 μm solder bumps and five assemblies with 30 μm bumps were subjected to electromigration tests of 14 kA/cm2 or 25 kA/cm2, respectively. Six of the 40 μm-assemblies failed after 7,000 h and none of the 30 μm-assemblies failed after 2,500 h of test duration so far. Investigation of failed samples performed with SEM and EDX showed asymmetric changes of microstructure in respect to current flow. Several intermetallic phases were found to form in the solder. The predominant damage of the interconnects was found to occur at the cathode contact to chip; the Ni-P layers there showed typical columnar Kirkendall voids caused by migration of Ni from the layers into the solder. Failure of the contacts apparently occurred at the interface between Ni-P and solder. In summary, the results of the study indicate a very high stability of lead-free solder connections on ceramic substrates against electromigration. This high stability is primarily due to a better heat dissipation and thus to a relatively low temperature increase of the ceramic packages caused by resistive heating during flow of electric current. In addition, the type of the metallization used in the study seems to be more resistant to electromigration than the standard PCB metallization as it does not contain a copper layer.


2010 ◽  
Vol 2010 (1) ◽  
pp. 000847-000854 ◽  
Author(s):  
Rabindra N. Das ◽  
John M. Lauffer ◽  
Steven G. Rosser ◽  
Mark D. Poliks ◽  
Voya R. Markovich

This paper discusses thin film technology based on barium titanate (BaTiO3)-epoxy polymer nanocomposites. In particular, we highlight recent developments on high capacitance, large area, thin film passives and their integration in System in a Package (SiP). A variety of nanocomposite thin films ranging from 2 microns to 25 microns thick were processed on PWB substrates by liquid coating or printing processes. SEM micrographs showed uniform particle distribution in the coatings. The electrical performance of composites was characterized by dielectric constant (Dk), capacitance and dissipation factor (loss) measurements. We have designed and fabricated several printed wiring board (PWB) and flip-chip package test vehicles focusing on resistors and capacitors. Two basic capacitor cores were used for this study. One is a layer capacitor. The second capacitor in this case study was discrete capacitor. Resin Coated Copper Capacitive (RC3) nanocomposites were used to fabricate 35 mm substrates with a two by two array of 15mm square isolated epoxy based regions; each having two to six RC3 based embedded capacitance layers. Cores are showing high capacitance density ranging from 15 nF to 30nF depending on Cu area, composition and thickness of the capacitors. In another design, we have used eight layer high density internal core and subsequent fine geometry n (1 to 3) buildup layers to form a n-8-n structure. The eight layer internal core has two resistance layers in the middle and 2 to 6 capacitance layer sequentially applied on the surface. The study also evaluates the resistor materials for embedded passives. Resistors are carbon based pastes and metal based alloys NiCrAlSi. Embedded resistor technology can use either thin film materials, that are applied on the copper foil, or screened carbon based resistor pastes that can achieve any resistor value at any level. For example, combination of 25 ohm per square material and 250 ohm per square material enables resistor ranges from 15 ohms through 30,000 ohms with efficient sizes for the embedded resistors. Similarly, printable resistors can be designed to cover the resistance in the range of 5 ohms to 1 Mohm. The embedded resistors can be laser trimmed to a tolerance of <5% for applications that require tighter tolerance. Reliability of the test vehicles was ascertained by IR-reflow, thermal cycling, PCT (Pressure Cooker Test ) and solder shock. Embedded discrete capacitors were stable after PCT and solder shock. Capacitance change was less than 5% after IR reflow (assembly) preconditioning (3X, 245 °C) and 1400 cycles DTC (Deep Thermal Cycle).


2019 ◽  
Vol 34 (3) ◽  
pp. 035007 ◽  
Author(s):  
Burhan K SaifAddin ◽  
Abdullah Almogbel ◽  
Christian J Zollner ◽  
Humberto Foronda ◽  
Ahmed Alyamani ◽  
...  

Author(s):  
Tz-Cheng Chiu ◽  
Huang-Chun Lin

The interface crack problem in integrated circuit devices was considered by using global and local modeling approach. In the global analysis the thin film interconnect was modeled by a homogenized layer with material constants obtained from representative volume element (RVE) analysis. Local analyses were then considered to determine fracture mechanics parameters. It was shown that the multiscale model with RVE approach gives accurate fracture mechanics parameters for an interface crack under either thermal or mechanical loads; while significant error was observed when the thin film layers are ignored in the global analysis. The problem of an interface crack between low-k dielectric and etch-stop thin film in a flip-chip package under thermal loading was also investigated as an application example of the multiscale modeling.


2013 ◽  
Vol 668 ◽  
pp. 288-291
Author(s):  
P.S. Pa

A newly designed arc-form shaped tool was used to carry out precise micro electrochemical etching (MECE) to remove Indium-tin-oxide (In2O3SnO2) thin-film nanostructures from the optical PET diaphragm surfaces for digital-paper surface. For this precise removal process, a higher current with a faster feed rate of the optical PET diaphragm effectively achieved rapid material removal. A pulsed direct current can improve dregs discharge and is advantageous when associated with fast PET feed rates, but this raises the total current required. A higher temperature or flow velocity of the electrolyte corresponds to a higher removal rate of the In2O3SnO2 nanostructures. A high rotational speed of the arc-form shaped tool corresponds to a higher removal rate of In2O3SnO2. A large cathode, along with a small gap-width between the cathode and the PET diaphragm, increases In2O3SnO2 removal rates. A thin cathode, or a short arc length of the arc-form anode, reduces the time taken for In2O3SnO2 removal.


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