Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

2021 ◽  
Author(s):  
Shaonan Zheng ◽  
Helen Cai ◽  
Linfang Xu ◽  
Nanxi Li ◽  
Jinjing Fu ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Silicon Substrate ◽  
Hollow Waveguides

scholarly journals iHEART: a miniaturized near-infrared in-line gas sensor using heart-shaped substrate-integrated hollow waveguides

The Analyst ◽  
2016 ◽  
Vol 141 (18) ◽  
pp. 5298-5303 ◽  
Author(s):  
Rafael L. Ribessi ◽  
Thiago de A. Neves ◽  
Jarbas J. R. Rohwedder ◽  
Celio Pasquini ◽  
Ivo M. Raimundo ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Near Infrared ◽  
Gas Sensing ◽  
Hollow Waveguide ◽  
Hollow Waveguides ◽  
Sensing System

Integration of a heart-shaped substrate-integrated hollow waveguide with a micro-spectrometer results in an ultra-compact gas sensing system: iHEART.

scholarly journals A Multifunctional Humidity-Gas Sensor Fabricated on a Silicon Substrate

1998 ◽  
Vol 118 (12) ◽  
pp. 595-601 ◽  
Author(s):  
Kotaro Nemoto ◽  
Supratic Chakraborty ◽  
Kazuhiro Hara
Keyword(s):  
Gas Sensor ◽  
Silicon Substrate

scholarly journals An Integrated Gas Sensor Fabricated on a Silicon Substrate

1998 ◽  
Vol 118 (12) ◽  
pp. 602-607 ◽  
Author(s):  
Hidehisa Murayama ◽  
Tsuyoshi Ogura ◽  
Kazuhiro Hara
Keyword(s):  
Gas Sensor ◽  
Silicon Substrate

Development and Optimization of a Mid-Infrared Hollow Waveguide Gas Sensor Combined with a Supported Capillary Membrane Sampler

2003 ◽  
Vol 57 (6) ◽  
pp. 600-606 ◽  
Author(s):  
Fabiano De Melas ◽  
Viktor V. Pustogov ◽  
Nathan Croitoru ◽  
Boris Mizaikoff
Keyword(s):  
Gas Sensor ◽  
Industrial Applications ◽  
Hollow Waveguide ◽  
Mid Infrared ◽  
Hollow Waveguides ◽  
Sensing System ◽  
Capillary Membrane ◽  
Sensor Module ◽  
Optical Configuration ◽  
Ft Ir

A gas sensor for application in water analysis was developed by combination of a mid-infrared (MIR) hollow waveguide with a Fourier transform infrared (FT-IR) spectrometer and coupling of the hollow waveguide gas sensor module to a supported capillary membrane sampler (SCMS) for continuous liquid-gas extraction. Different hollow waveguides have been characterized in this study for developing an optimized optical configuration. Analysis of industrially relevant compounds has been performed, investigating chlorinated hydrocarbons (CHCs), such as dichloromethane and chloroform, representing highly volatile analytes, and 1,4-dioxane as an example of target compounds with low volatility. The suitability of this spectroscopic IR sensing system for industrial applications is demonstrated under simulated real-world conditions with limits of detection in the ppb (v/v) and ppm (v/v) concentration range for CHCs and 1,4-dioxane, respectively.

A planar integrated chlorinated hydrocarbon gas sensor on a silicon substrate

1991 ◽  
Vol 5 (1-4) ◽  
pp. 199-203 ◽  
Author(s):  
D. Keyvani ◽  
J. Maclay ◽  
S. Lee ◽  
J. Stetter ◽  
Z. Cao
Keyword(s):  
Gas Sensor ◽  
Silicon Substrate ◽  
Chlorinated Hydrocarbon ◽  
Hydrocarbon Gas

iHWG-μNIR: a miniaturised near-infrared gas sensor based on substrate-integrated hollow waveguides coupled to a micro-NIR-spectrophotometer

The Analyst ◽  
2014 ◽  
Vol 139 (14) ◽  
pp. 3572 ◽  
Author(s):  
J. J. R. Rohwedder ◽  
C. Pasquini ◽  
P. R. Fortes ◽  
I. M. Raimundo ◽  
A. Wilk ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Near Infrared ◽  
Hollow Waveguides
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