Microstructured silicon substrate for low-power multi-gas-sensor applications
2010 ◽
Vol 144
(2)
◽
pp. 400-406
◽
2016 ◽
Vol 6
(7)
◽
pp. 144
◽
1995 ◽
Vol 25
(1-3)
◽
pp. 343-346
◽
2018 ◽
Vol 89
(10)
◽
pp. 103103
◽
2016 ◽
Vol 236
◽
pp. 978-987
◽
2011 ◽
Vol 155
(1)
◽
pp. 199-205
◽
Keyword(s):