Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
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2003 ◽
Vol 14
(4)
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pp. 517-522
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2016 ◽
Vol 18
(23)
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pp. 15574-15583
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1991 ◽
Vol 30
(Part 2, No. 2B)
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pp. L306-L308
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