Fundamental mechanisms and doping effects in silicon infrared absorption for temperature measurement by infrared transmission

1991 ◽  
Author(s):  
James C. Sturm ◽  
Casper M. Reaves
Keyword(s):  
Temperature Measurement ◽  
Infrared Absorption ◽  
Infrared Transmission ◽  
Doping Effects

scholarly journals Localized surface plasmons in structures with linear Au nanoantennas on a SiO2/Si surface

2016 ◽  
Vol 7 ◽  
pp. 1519-1526 ◽  
Author(s):  
Ilya A Milekhin ◽  
Sergei A Kuznetsov ◽  
Ekaterina E Rodyakina ◽  
Alexander G Milekhin ◽  
Alexander V Latyshev ◽  
...  
Keyword(s):  
Penetration Depth ◽  
Surface Plasmons ◽  
Infrared Absorption ◽  
Transmission Spectra ◽  
Localized Surface Plasmons ◽  
Optical Phonons ◽  
Infrared Transmission ◽  
Phonon Modes ◽  
Electromagnetic Simulations

The study of infrared absorption by linear gold nanoantennas fabricated on a Si surface with underlying SiO2 layers of various thicknesses allowed the penetration depth of localized surface plasmons into SiO2 to be determined. The value of the penetration depth derived experimentally (20 ± 10 nm) corresponds to that obtained from electromagnetic simulations (12.9–30.0 nm). Coupling between plasmonic excitations of gold nanoantennas and optical phonons in SiO2 leads to the appearance of new plasmon–phonon modes observed in the infrared transmission spectra the frequencies of which are well predicted by the simulations.

Temperature Measurement of Metallized Silicon Wafers by Infrared Transmission Using Single- and Double-Pass Geometries

1994 ◽  
Vol 342 ◽  
Author(s):  
C.W. Cullen ◽  
J.C. Sturm
Keyword(s):  
Temperature Measurement ◽  
Silicon Wafer ◽  
Silicon Wafers ◽  
Infrared Transmission ◽  
Double Pass ◽  
Wafer Temperature ◽  
Single Pass ◽  
Transmission Technique

ABSTRACTThe infrared transmission technique for the measurement of silicon wafer temperature has been extended to metallized wafers. For wafers with partial metal coverage, a single-pass method has been demonstrated from 200°C to 550°C. For wafers with blanket metal coverage, a novel double-pass infrared transmission technique is presented.

Infrared Techniques for Temperature Measurement in Plasmajets

1962 ◽  
Vol 84 (2) ◽  
pp. 164-168 ◽  
Author(s):  
Richard H. Tourin
Keyword(s):  
Temperature Measurement ◽  
Absorption Spectra ◽  
Infrared Absorption ◽  
Low Temperatures ◽  
Visible Region ◽  
Infrared Emission ◽  
Temperature Gradients ◽  
Monochromatic Radiation ◽  
Emission And Absorption Spectra ◽  
Infrared Techniques

The application of monochromatic radiation pyrometry to measurement of plasma temperatures was investigated. Infrared emission and absorption spectra of nitrogen, argon, and helium plasmajets, with various admixtures, were measured. Strong infrared emission was observed in various lines and bands in the plasma spectra, extending from the visible region to 7.0 μ. The observed infrared absorption was generally low. Temperatures measured ranged from below 2000 deg K for a N2 plasmajet heavily seeded with CO2, to 13,000 deg K for pure Ar. Temperature gradients in a plasmajet were inferred from observations made through various regions of the jet.

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