Particulate and molecular contamination control in EUV-induced H2-plasma in EUV lithographic scanner

2020 ◽  
Author(s):  
Mark A. van de Kerkhof ◽  
Ernst Galutschek ◽  
Andrei Yakunin ◽  
Selwyn Cats ◽  
Christian Cloin
Keyword(s):  
Contamination Control

Validity-Study of Commercial Semiconductor with TO-18 Package for Space Application by PIND Test

2013 ◽  
Author(s):  
Yusuke Nakatake ◽  
Makoto Okabe ◽  
Shota Sato
Keyword(s):  
Industrial Applications ◽  
Validity Study ◽  
Space Application ◽  
Noise Detection ◽  
Foreign Material ◽  
Contamination Control ◽  
X Ray ◽  
Impact Noise ◽  
Report Analysis ◽  
Foreign Materials

Abstract In this paper, we carried out PIND (Particle Impact Noise Detection) test and X-ray inspection of a transistor in a TO-18 package for commercial and industrial applications. From our evaluation results, we explain the validity of the PIND test by comparing PIND test and X-ray inspection results. We make clear that PIND test is able to detect internal foreign material that may be transparent to X-ray inspection. In addition, we report analysis results of internal foreign materials from defective devices. This matter suggests that a problem is contamination control in the manufacturing process, most likely the sealing process.

scholarly journals Bacterial contamination control mats: a comparative study

1977 ◽  
Vol 79 (1) ◽  
pp. 133-140 ◽  
Author(s):  
H. M. Meddick
Keyword(s):  
Comparative Study ◽  
Working Conditions ◽  
Bacterial Contamination ◽  
Contamination Control ◽  
Different Types

SUMMARYThe ability of six different types of contamination control mats currently in use at the entrances to theatre suites and other clean areas to remove bacteria-carrying particles from theatre trolley wheels was compared. Marked differences in the effectiveness of this property were obtained; and all mats showed some disadvantages. Modification of one of the mats has resulted in improved efficiency under working conditions.

Dynamic balance analysis of contamination control for hydraulic systems based on dynamic filtration ratio

2016 ◽  
Vol 68 (1) ◽  
pp. 45-51
Author(s):  
Guangying Ma ◽  
Shurong Ning ◽  
Yunlong Hu ◽  
jun Gao
Keyword(s):  
Hydraulic System ◽  
Dynamic Balance ◽  
Contamination Level ◽  
Hydraulic Systems ◽  
Level Control ◽  
Content Type ◽  
Contamination Control ◽  
Precise Control ◽  
Dynamic Filtration ◽  
The Relationship

Purpose – The aim of this study is to establish a dynamic model of the filtration ratio. For the problem that the measured value of the filtration ratio is far less than the theoretical value in the actual hydraulic filtering system, the paper aims to find the relationship between the filtration ratio and the parameters of the hydraulic systems, such as the contamination level and the dirt-holding quantity of the filter. Design/methodology/approach – The paper opted for the method of experimental analysis and simulation to determine the relationship between the filtration ratio and the parameters of the hydraulic system, and established a dynamic filtration ratio model. Findings – The paper provides a preliminary model of dynamic filtration ratio, and the model shows that the filtration ratio is exponentially related to the contamination level and the dirt-holding quantity. Different filters have different influence coefficients. The filtering capacity for a certain particle size and the contamination level control of the filter for different hydraulic systems can be judged according to the dynamic balance equation of hydraulic systems. Originality/value – The paper is useful in the selection of filters and in the precise control of the contamination level of the hydraulic system.

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