EUV resist chemical gradient enhancement by UV flood exposure for improvement in EUV resist resolution, process control, roughness, sensitivity and stochastic defectivity

2020 ◽  
Author(s):  
Seiji Nagahara ◽  
Cong Que Dinh ◽  
Keisuke Yoshida ◽  
Gosuke Shiraishi ◽  
Yoshihiro Kondo ◽  
...  
Keyword(s):  
Process Control ◽  
Chemical Gradient ◽  
Resolution Process ◽  
Flood Exposure ◽  
Gradient Enhancement

Evaluation of Chemical Gradient Enhancement Methods for Chemically Amplified Extreme Ultraviolet Resists

2009 ◽  
Vol 48 (12) ◽  
pp. 126004 ◽  
Author(s):  
Takahiro Kozawa ◽  
Hiroaki Oizumi ◽  
Toshiro Itani ◽  
Seiichi Tagawa
Keyword(s):  
Extreme Ultraviolet ◽  
Chemical Gradient ◽  
Chemically Amplified ◽  
Gradient Enhancement

INSTRUMENTATION - Mass Spectrometry Process Control

1956 ◽  
Vol 48 (2) ◽  
pp. 81-84
Author(s):  
William Priestley ◽  
B. Dudenbostel, Jr.
Keyword(s):  
Mass Spectrometry ◽  
Process Control

FTIR based process control for industrial reactors

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-995-Pr8-1002 ◽  
Author(s):  
V. Hopfe ◽  
W. Grählert ◽  
O. Throl
Keyword(s):  
Process Control
Sign in / Sign up

Export Citation Format

Share Document