High resolution acoustic metrology by combining high GHZ frequency ultrasound and scanning probe microscopy

Author(s):  
Maarten H. van Es ◽  
Benoit A. I. Quesson ◽  
Abbas Mohtashami ◽  
Daniele Piras ◽  
Kodai Hatakeyama ◽  
...  
Author(s):  
J. Brostin

The field emission SEM (FESEM) is well suited for imaging polymer and other non-conductive surfaces. High resolution SEM images can be obtained without the application of a conductive coating when operated at low accelerating voltages. Compositional imaging in the backscattered electron mode is facilitated at low voltages by the incorporation of a microchannel plate (MCP) detector. The MCP equipped FESEM has been shown to be phenomenally sensitive to very small differences in average atomic number. Compositional contrasts are achieved in polymer and other low-Z composites that differ only in oxygen content. Those systems that completely lack intrinsic contrast can be differentially stained with ruthenium tetroxide vapors.These capabilities make the FESEM an ideal platform for locating phases and/or subtle features for scanning probe microscopy (SPM). Transparent, thin coatings or very fine, heterogeneously dispersed structures that cannot be readily located or observed with conventional light optics can generally be seen in the FESEM.


2006 ◽  
Vol 12 (S02) ◽  
pp. 510-511
Author(s):  
DH Dahayanaka ◽  
DW Kelle ◽  
DJ Wasielewski ◽  
ES Day ◽  
DR White ◽  
...  

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005


2017 ◽  
Author(s):  
Hossein J. Sharahi ◽  
Gajendra Shekhawat ◽  
Vinayak Dravid ◽  
Philip Egberts ◽  
Seonghwan Kim

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