Experimental verification of sub-wavelength holographic lithigraphy (SWHL) concept

Author(s):  
Mike Borisov ◽  
Dmitriy Chelubeev ◽  
Vitaly V. Chernik ◽  
Lev Merkushov ◽  
Vadim Rakhovskiy ◽  
...  
2017 ◽  
Vol 137 (8) ◽  
pp. 631-638 ◽  
Author(s):  
Hiroki Yamano ◽  
Koji Takechi ◽  
Hiroaki Kakigano ◽  
Makoto Ohashi

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