Three-dimensional shape measurement of fine structure by detecting phase distribution of only zeroth order diffraction beam based on speckle interferometry

2019 ◽  
Author(s):  
Yasuhiko Arai
Keyword(s):  
Fine Structure ◽  
Phase Distribution ◽  
Three Dimensional ◽  
Speckle Interferometry ◽  
Shape Measurement ◽  
Zeroth Order ◽  
Order Diffraction ◽  
Dimensional Shape ◽  
Three Dimensional Shape

Three-dimensional Shape Measurement using Non-contact Line Laser Probe

2021 ◽  
Vol 2021.74 (0) ◽  
pp. F41
Author(s):  
Masanori KAJIKI ◽  
Syuhei KUROKAWA ◽  
Terutake HAYASHI ◽  
Kuniharu YAMAMOTO
Keyword(s):  
Contact Line ◽  
Three Dimensional ◽  
Shape Measurement ◽  
Laser Probe ◽  
Dimensional Shape ◽  
Three Dimensional Shape
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