Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry

2018 ◽  
Author(s):  
Yasuhiko Arai
2021 ◽  
Vol 2021.74 (0) ◽  
pp. F41
Author(s):  
Masanori KAJIKI ◽  
Syuhei KUROKAWA ◽  
Terutake HAYASHI ◽  
Kuniharu YAMAMOTO

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