Influence of power and pulsed regime of low frequency discharge on clusters incorporation in dielectric films for ReRAM application

2019 ◽  
Author(s):  
Alexander Popov ◽  
Arcady Berdnikov
Keyword(s):  
Low Frequency ◽  
Dielectric Films ◽  
Pulsed Regime

Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects

2014 ◽  
Vol 115 (14) ◽  
pp. 144107 ◽  
Author(s):  
E. Todd Ryan ◽  
Stephen M. Gates ◽  
Stephan A. Cohen ◽  
Yuri Ostrovski ◽  
Ed Adams ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Large Scale ◽  
Low Frequency ◽  
Chemical Vapor ◽  
Dielectric Films ◽  
Chemical Vapor Deposited

Microdielectric Measurements of Pristine and Modified thin Fullerene (C60) Films

1994 ◽  
Vol 359 ◽  
Author(s):  
B. Pevznert ◽  
A. F. Hebard ◽  
R. C. Haddon ◽  
S. D. Senturiat ◽  
M. S. Dresselhaus
Keyword(s):  
Dielectric Properties ◽  
Low Frequency ◽  
Dielectric Films ◽  
Neutral Species ◽  
Interstitial Volume ◽  
Microfabrication Technology ◽  
Frequency Behavior ◽  
Mobile Ions ◽  
C60 Films

ABSTRACTAs developed by Senturia and co-workers [1], microdielectrometry is a technique for measuring complex permittivity utilizing microfabrication technology to incorporate both the interdigital sensing electrodes and associated circuitry on the same microchip. By covering a microdielectrometer chip with a thin layer of C60, it is possible to dynamically monitor the film's frequency response and dielectric properties as a function of doping with selected gases and other species.It is known that solid C60 has a substantial amount of interstitial volume. The presence of mobile ions in these spaces compromises the breakdown voltage and makes pure C60 unsuitable for applications requiring high-quality dielectric films. However, various immobile ions or neutral species (e.g. oxygen) can be made to fill the interstitial volume, changing the characteristics of the C60 films and, in some cases, improving the dielectric properties. In-situ microdielectric measurements of pristine and modified C60 films were performed for frequencies ranging from 0.005 Hz to 100 kHz. Based on the low-frequency behavior of the dielectric constant, a model is proposed for the mechanism of oxygen diffusion into the interstitial spaces of the fullerene material.

A Study on the Fine Structure of the Lateral Line Organ of the Sea Eel

1973 ◽  
Vol 31 ◽  
pp. 648-649
Author(s):  
K. Hama
Keyword(s):  
Fine Structure ◽  
Electron Microscope ◽  
Lateral Line ◽  
Low Frequency ◽  
Sensory Cells ◽  
Apical Surface ◽  
Voltage Electron ◽  
Sensory Epithelia ◽  
Low Frequency Vibration ◽  
Transmission Electron

The lateral line organs of the sea eel consist of canal and pit organs which are different in function. The former is a low frequency vibration detector whereas the latter functions as an ion receptor as well as a mechano receptor.The fine structure of the sensory epithelia of both organs were studied by means of ordinary transmission electron microscope, high voltage electron microscope and of surface scanning electron microscope.The sensory cells of the canal organ are polarized in front-caudal direction and those of the pit organ are polarized in dorso-ventral direction. The sensory epithelia of both organs have thinner surface coats compared to the surrounding ordinary epithelial cells, which have very thick fuzzy coatings on the apical surface.

Lectin Binding to Human Breast Tumor Cells

1976 ◽  
Vol 34 ◽  
pp. 34-35
Author(s):  
Robert E. Nordquist ◽  
J. Hill Anglin ◽  
Michael P. Lerner
Keyword(s):  
Carcinoma Cell ◽  
Ricinus Communis ◽  
Lectin Binding ◽  
Low Frequency ◽  
Breast Carcinoma Cell Line ◽  
Human Breast ◽  
Human Breast Tumor ◽  
Duct Carcinoma ◽  
Specific Antigens ◽  
Ricin Agglutinin

A human breast carcinoma cell line (BOT-2) was derived from an infiltrating duct carcinoma (1). These cells were shown to have antigens that selectively bound antibodies from breast cancer patient sera (2). Furthermore, these tumor specific antigens could be removed from the living cells by low frequency sonication and have been partially characterized (3). These proteins have been shown to be around 100,000 MW and contain approximately 6% hexose and hexosamines. However, only the hexosamines appear to be available for lectin binding. This study was designed to use Concanavalin A (Con A) and Ricinus Communis (Ricin) agglutinin for the topagraphical localization of D-mannopyranosyl or glucopyranosyl and D-galactopyranosyl or DN- acetyl glactopyranosyl configurations on BOT-2 cell surfaces.

Practical High Resolution Microscopy

1968 ◽  
Vol 26 ◽  
pp. 302-303
Author(s):  
P. A. Marsh ◽  
T. Mullens ◽  
D. Price
Keyword(s):  
High Resolution ◽  
Magnetic Fields ◽  
Low Frequency ◽  
Resolving Power ◽  
Careful Attention ◽  
Electron Microscopes ◽  
The Relationship ◽  
High Resolution Microscopy ◽  
New Facilities

It is possible to exceed the guaranteed resolution on most electron microscopes by careful attention to microscope parameters essential for high resolution work. While our experience is related to a Philips EM-200, we hope that some of these comments will apply to all electron microscopes.The first considerations are vibration and magnetic fields. These are usually measured at the pre-installation survey and must be within specifications. It has been our experience, however, that these factors can be greatly influenced by the new facilities and therefore must be rechecked after the installation is completed. The relationship between the resolving power of an EM-200 and the maximum tolerable low frequency interference fields in milli-Oerstedt is 10 Å - 1.9, 8 Å - 1.4, 6 Å - 0.8.

Electron microscopy studies of PZT ferroelectric film capacitor structures

1992 ◽  
Vol 50 (2) ◽  
pp. 1364-1365
Author(s):  
V. Kaushik ◽  
P. Maniar ◽  
J. Olowolafe ◽  
R. Jones ◽  
A. Campbell ◽  
...  
Keyword(s):  
Electric Fields ◽  
Sol Gel ◽  
Ferroelectric Material ◽  
Dielectric Constants ◽  
Dielectric Films ◽  
Lead Zirconium Titanate ◽  
Si Substrate ◽  
Film Capacitor ◽  
Pzt Films ◽  
High Dielectric

Lead zirconium titanate films (Pb (Zr,Ti) O3 or PZT) are being considered for potential application as dielectric films in memory technology due to their high dielectric constants. PZT is a ferroelectric material which shows spontaneous polarizability, reversible under applied electric fields. We report herein some results of TEM studies on thin film capacitor structures containing PZT films with platinum-titanium electrodes.The wafers had a stacked structure consisting of PZT/Pt/Ti/SiO2/Si substrate as shown in Figure 1. Platinum acts as electrode material and titanium is used to overcome the problem of platinum adhesion to the oxide layer. The PZT (0/20/80) films were deposited using a sol-gel method and the structure was annealed at 650°C and 800°C for 30 min in an oxygen ambient. XTEM imaging was done at 200KV with the electron beam parallel to <110> zone axis of silicon.Figure 2 shows the PZT and Pt layers only, since the structure had a tendency to peel off at the Ti-Pt interface during TEM sample preparation.

Simulations of high-resolution images of amorphous silicon films

1986 ◽  
Vol 44 ◽  
pp. 544-545
Author(s):  
G. Y. Fan ◽  
J. M. Cowley
Keyword(s):  
Electron Microscope ◽  
High Frequency ◽  
Fourier Transformation ◽  
Amorphous Materials ◽  
Low Frequency ◽  
Chromatic Aberration ◽  
Structure Information ◽  
Frequency Components ◽  
High Resolution Images ◽  
Spatial Frequency Spectrum

It is well known that the structure information on the specimen is not always faithfully transferred through the electron microscope. Firstly, the spatial frequency spectrum is modulated by the transfer function (TF) at the focal plane. Secondly, the spectrum suffers high frequency cut-off by the aperture (or effectively damping terms such as chromatic aberration). While these do not have essential effect on imaging crystal periodicity as long as the low order Bragg spots are inside the aperture, although the contrast may be reversed, they may change the appearance of images of amorphous materials completely. Because the spectrum of amorphous materials is continuous, modulation of it emphasizes some components while weakening others. Especially the cut-off of high frequency components, which contribute to amorphous image just as strongly as low frequency components can have a fundamental effect. This can be illustrated through computer simulation. Imaging of a whitenoise object with an electron microscope without TF limitation gives Fig. 1a, which is obtained by Fourier transformation of a constant amplitude combined with random phases generated by computer.

SEM image sharpness analysis

1996 ◽  
Vol 54 ◽  
pp. 142-143
Author(s):  
M. T. Postek ◽  
A. E. Vladar
Keyword(s):  
High Frequency ◽  
Low Frequency ◽  
Quantitative Information ◽  
Primary Electron ◽  
Image Sharpness ◽  
Critical Dimensions ◽  
Sem Image ◽  
Frequency Changes ◽  
Electron Microscopes ◽  
Scanning Electron

Fully automated or semi-automated scanning electron microscopes (SEM) are now commonly used in semiconductor production and other forms of manufacturing. The industry requires that an automated instrument must be routinely capable of 5 nm resolution (or better) at 1.0 kV accelerating voltage for the measurement of nominal 0.25-0.35 micrometer semiconductor critical dimensions. Testing and proving that the instrument is performing at this level on a day-by-day basis is an industry need and concern which has been the object of a study at NIST and the fundamentals and results are discussed in this paper.In scanning electron microscopy, two of the most important instrument parameters are the size and shape of the primary electron beam and any image taken in a scanning electron microscope is the result of the sample and electron probe interaction. The low frequency changes in the video signal, collected from the sample, contains information about the larger features and the high frequency changes carry information of finer details. The sharper the image, the larger the number of high frequency components making up that image. Fast Fourier Transform (FFT) analysis of an SEM image can be employed to provide qualitiative and ultimately quantitative information regarding the SEM image quality.

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