Virtual fabrication and advanced process control improve yield for SAQP process assessment with 16 nm half-pitch

2019 ◽  
Author(s):  
Benjamin Vincent ◽  
Stephane Lariviere ◽  
Chris Wilson ◽  
Ryan Kim ◽  
Joseph Ervin
Keyword(s):  
Process Control ◽  
Process Assessment ◽  
Advanced Process Control

Increasing revenue and reducing cost through the use of advanced process control technology in the sugar industry

2016 ◽  
pp. 620-624
Author(s):  
Scott Kahre
Keyword(s):  
Process Control ◽  
Sugar Industry ◽  
Operating Cost ◽  
Control Technology ◽  
Advanced Process Control ◽  
Output Controller ◽  
Complex Processes ◽  
Unit Operations ◽  
Sugar Unit ◽  
Optimum Cost

Advanced process control technology can provide sugar processors the ability to realize major revenue enhancements and/or operating cost reductions with low initial investment. One technology in particular, model predictive control (MPC), holds the potential to increase production, reduce energy costs, and reduce quality variability in a wide variety of major sugar unit operations. These include centrifugal stations, pulp dryers, extractors, diffusers, mills, evaporating crystallizers, juice purification, and more. Simple payback periods as low as two months are projected. As a PC-based add-on to existing distributed control systems (DCS) or programmable logic controller (PLC) systems, MPC acts as a multi-input, multi-output controller, utilizing predictive process response models and optimization functions to control complex processes to their optimum cost and quality constraints.

Implementation and benefits of advanced process control for lithography CD and overlay

2003 ◽  
Author(s):  
Lena Zavyalova ◽  
Chong-Cheng Fu ◽  
Gary S. Seligman ◽  
Perry A. Tapp ◽  
Victor Pol
Keyword(s):  
Process Control ◽  
Advanced Process Control

Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)

2003 ◽  
Author(s):  
Timothy D. Stanley ◽  
Richard J. Markle ◽  
Brad Van Eck ◽  
Brian K. Cusson ◽  
Matthew A. Purdy ◽  
...  
Keyword(s):  
Process Control ◽  
Advanced Process Control

Advanced Process Control of HfxSi1-xO2 Composition using Co-injection Atomic Layer Deposition

2019 ◽  
Vol 18 (1) ◽  
pp. 567-574 ◽  
Author(s):  
Larry Bartholomew ◽  
Andy Bavin ◽  
Thierry Lazerand ◽  
Vivek Rao ◽  
Matthew Weldon ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Process Control ◽  
Atomic Layer ◽  
Advanced Process Control ◽  
Layer Deposition
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