Latent imaging of resists via resonant x-ray scattering: unraveling the effects of chain scission to chemical amplification (Conference Presentation)
2002 ◽
Vol 12
(6)
◽
pp. 385-390
◽
1987 ◽
Vol 48
(C9)
◽
pp. C9-855-C9-858
◽
2007 ◽
Vol 2007
(suppl_26)
◽
pp. 247-252
2007 ◽
Vol 2007
(suppl_26)
◽
pp. 247-252
◽