Remote plasma chemical vapour deposition of group III-nitride tunnel junctions for LED applications

2019 ◽  
Author(s):  
S. Barik ◽  
D. Liu ◽  
J. D. Brown ◽  
M. Wintrebert-Fouquet ◽  
A. J. Fernandes ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Tunnel Junctions ◽  
Chemical Vapour ◽  
Remote Plasma ◽  
Plasma Chemical ◽  
Group Iii ◽  
Plasma Chemical Vapour Deposition ◽  
Group Iii Nitride

SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors

2003 ◽  
Vol 429 (1-2) ◽  
pp. 144-151 ◽  
Author(s):  
T.P. Smirnova ◽  
A.M. Badalian ◽  
L.V. Yakovkina ◽  
V.V. Kaichev ◽  
V.I. Bukhtiyarov ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Remote Plasma ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition
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