Advanced oxide thin films produced by excimer laser-assisted metal organic compound (ELAMOD) (Conference Presentation)

2019 ◽  
Author(s):  
Tetsuo Tsuchiya
Keyword(s):  
Thin Films ◽  
Organic Compound ◽  
Excimer Laser ◽  
Oxide Thin Films ◽  
Metal Organic

Tunable photoluminescent properties of Eu-doped β-Ga2O3phosphor thin films prepared via excimer laser-assisted metal organic decomposition

2014 ◽  
Vol 53 (5S1) ◽  
pp. 05FB14 ◽  
Author(s):  
Tetsuo Tsuchiya ◽  
Tomoya Matsuura ◽  
Kentaro Shinoda ◽  
Tomohiko Nakajima ◽  
Junji Akimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Metal Organic ◽  
Organic Decomposition

Design of process diagnostics for excimer laser irradiation of oxide thin films

2014 ◽  
Vol 53 (5S1) ◽  
pp. 05FB08 ◽  
Author(s):  
Kentaro Shinoda ◽  
Tomohiko Nakajima ◽  
Mutsuko Hatano ◽  
Tetsuo Tsuchiya
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Oxide Thin Films ◽  
Process Diagnostics ◽  
Excimer Laser Irradiation

Excimer laser deposition and characteristics of tin oxide thin films

1998 ◽  
Vol 320 (2) ◽  
pp. 216-219 ◽  
Author(s):  
Guorui Dai ◽  
Xilan Jiang ◽  
Yushu Zhang
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Tin Oxide ◽  
Laser Deposition ◽  
Oxide Thin Films
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