scholarly journals Surface Potential of Magnesium Oxide Thin Films Prepared by Metal Organic Decomposition MOD

2011 ◽  
Vol 36 (2) ◽  
pp. 199-203
Author(s):  
S-I. Yamamoto ◽  
H. Yoshioka ◽  
Y. Nakajima ◽  
S. Hasegawa
Keyword(s):  
Thin Films ◽  
Magnesium Oxide ◽  
Surface Potential ◽  
Oxide Thin Films ◽  
Metal Organic ◽  
Organic Decomposition

Charge Trapping and Degradation Properties of PZT Thin Films for MEMS

1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell
Keyword(s):  
Thin Films ◽  
Loss Factor ◽  
High Field ◽  
Microelectromechanical Systems ◽  
Charge Trapping ◽  
Metal Organic ◽  
Electrical Reliability ◽  
Silicon Based ◽  
Degradation Properties ◽  
Organic Decomposition

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).

Sign in / Sign up

Export Citation Format

Share Document