Detection of particle defect components on silicon wafer with laser induced breakdown spectroscopy combined laser cleaning technology

2019 ◽  
Author(s):  
Lituo Liu ◽  
Xiaoya Yu ◽  
Weihu Zhou ◽  
Xiaomei Chen ◽  
Rongyi Ji ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Laser Cleaning ◽  
Laser Induced Breakdown Spectroscopy ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown ◽  
Cleaning Technology

Laser-induced breakdown spectroscopy for on-line control of laser cleaning of sandstone and stained glass

1999 ◽  
Vol 69 (4) ◽  
pp. 441-444 ◽  
Author(s):  
S. Klein ◽  
T. Stratoudaki ◽  
V. Zafiropulos ◽  
J. Hildenhagen ◽  
K. Dickmann ◽  
...  
Keyword(s):  
Laser Cleaning ◽  
Laser Induced Breakdown Spectroscopy ◽  
Stained Glass ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown ◽  
On Line

scholarly journals Real-Time Monitoring of Laser Cleaning for Hot-Rolled Stainless Steel by Laser-Induced Breakdown Spectroscopy

Metals ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 790
Author(s):  
Xing Li ◽  
Yingchun Guan
Keyword(s):  
Stainless Steel ◽  
Emission Line ◽  
Real Time ◽  
Oxide Layer ◽  
Laser Cleaning ◽  
Laser Induced Breakdown Spectroscopy ◽  
Cleaning Process ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown ◽  
Hot Rolled

Laser cleaning is a competitive alternative to ablate and remove the hard oxide layer on hot-rolled stainless steel. To meet the practical demand, laser-induced breakdown spectroscopy (LIBS) was applied for real-time monitoring of the cleaning process in this study. Furthermore, the as-received and laser cleaned surfaces were characterized by an optical micrograph, an X-ray diffractometer, and a laser scanning confocal microscope. The results showed the relative intensity ratio (RIR) of the FeI emission line at 520.9 nm and the CrI emission line at 589.2 could be a quantitative index to monitor the cleaning process. When the oxide layer was not fully cleaned, the LIBS signals of the substrate were not excited, and the ratio was almost invariant as the power of the laser increased. However, it sharply increased once the oxide layer was effectively cleaned, the cleaned surface was bright, and the surface roughness was smaller in this case. Subsequently, as the surface was over-cleaned with the further increase of laser power, the RIR value remained large. The optimal laser cleaning parameters obtained by the monitoring were determined to avoid re-oxidation and reduce the roughness of the cleaned surface.

scholarly journals Laser Cleaning and Spectroscopy: A Synergistic Approach in the Conservation of a Modern Painting

2006 ◽  
Vol 2006 ◽  
pp. 1-5 ◽  
Author(s):  
K. Melessanaki ◽  
C. Stringari ◽  
C. Fotakis ◽  
D. Anglos
Keyword(s):  
Laser Ablation ◽  
20Th Century ◽  
Material Removal ◽  
Laser Cleaning ◽  
Laser Induced Breakdown Spectroscopy ◽  
Standard Protocol ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown ◽  
Synergistic Approach

We present results from preliminary laser cleaning studies performed on a 20th century modern painting, in which laser-induced breakdown spectroscopy (LIBS) was employed for monitoring the progress of material removal. This synergistic approach, that combines laser ablation cleaning with spectroscopic control, is of obvious importance as it offers a reliable means of ensuring proper conservation and could be the basis of a standard protocol for laser-based restoration procedures.

Sign in / Sign up

Export Citation Format

Share Document