Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon
1971 ◽
Vol 6
(9)
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pp. 1225-1227
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2015 ◽
Vol 25
(3)
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pp. 035023
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2012 ◽
Vol 30
(7)
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pp. 1399-1404
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Keyword(s):
1997 ◽
Vol 6
(5-7)
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pp. 826-829
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