Kinetics and microstructure of laser chemical vapor deposition of titanium nitride

Mapping Intimacies ◽

10.1117/12.237738 ◽

1996 ◽

Cited By ~ 1

Author(s):

Kieth M. Egland ◽

Jyotirmoy Mazumder

Keyword(s):

Chemical Vapor Deposition ◽

Titanium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition

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Laser chemical-vapor deposition of titanium nitride

Physical Review B ◽

10.1103/physrevb.52.5947 ◽

1995 ◽

Vol 52 (8) ◽

pp. 5947-5952 ◽

Cited By ~ 11

Author(s):

Xiangli Chen ◽

Jyoti Mazumder

Keyword(s):

Chemical Vapor Deposition ◽

Titanium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition

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Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.10.042 ◽

2010 ◽

Vol 204 (14) ◽

pp. 2111-2117 ◽

Cited By ~ 4

Author(s):

Yansheng Gong ◽

Rong Tu ◽

Takashi Goto

Keyword(s):

Chemical Vapor Deposition ◽

Titanium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition

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Process diagnostics of laser chemical vapor deposition of titanium nitride

International Congress on Applications of Lasers & Electro-Optics ◽

10.2351/1.5058798 ◽

1994 ◽

Author(s):

Xiangli Chen ◽

Magdi Azer ◽

Keith Egland ◽

Jyoti Mazumder

Keyword(s):

Chemical Vapor Deposition ◽

Titanium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Chemical Vapor Deposition ◽

Process Diagnostics

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Laser Chemical Vapor Deposition of Titanium Nitride and Process Diagnostics With Laser Induced Fluorescence Spectroscopy

Laser Processing: Surface Treatment and Film Deposition ◽

10.1007/978-94-009-0197-1_35 ◽

1996 ◽

pp. 693-701

Author(s):

X. Chen ◽

M. N. Azer ◽

K. M. Egland ◽

J. Mazumder

Keyword(s):

Chemical Vapor Deposition ◽

Fluorescence Spectroscopy ◽

Titanium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Laser Induced Fluorescence ◽

Laser Chemical Vapor Deposition ◽

Process Diagnostics

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