Multi-color approach on self-aligned multiple patterning for single line cut application
Keyword(s):
1986 ◽
Vol 44
◽
pp. 84-87
Keyword(s):
2005 ◽
Vol 100
(3)
◽
pp. 1021
◽
2018 ◽
1993 ◽
Vol 32
(Part 2, No. 6A)
◽
pp. L785-L787
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