Roughness power spectral density as a function of resist parameters and its impact through process
2009 ◽
Vol 2
(1)
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pp. 40-47
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2021 ◽
Vol 160
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pp. 107912
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2021 ◽
Vol 1051
(1)
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pp. 012043
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2020 ◽
Vol 2020
(1)
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