Overlay and stitching metrology for massively parallel electron-beam lithography (Conference Presentation)

2018 ◽  
Author(s):  
Guido Rademaker ◽  
Erwin Slot ◽  
Guido de Boer ◽  
Dhara Dave ◽  
Marco Wieland ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Massively Parallel

scholarly journals Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

2013 ◽  
Vol 12 (3) ◽  
pp. 031107 ◽  
Author(s):  
Luca Grella ◽  
Allen Carroll ◽  
Kirk Murray ◽  
Mark A. McCord ◽  
William M. Tong ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Pattern Generator ◽  
Massively Parallel ◽  
Optical Mems ◽  
Digital Pattern

Design and Fabrication of Electrostatic Microcolumn With Varying Apertures in Massively Parallel Electron Beam Lithography

2017 ◽  
Author(s):  
Zhidong Du ◽  
Ye Wen ◽  
Liang Pan
Keyword(s):  
Electron Beam ◽  
Spatial Resolution ◽  
Electron Beam Lithography ◽  
High Spatial Resolution ◽  
Semiconductor Industry ◽  
Massively Parallel ◽  
Beam Source ◽  
Manufacturing Method

Massively parallel electron beam lithography may be an alternative manufacturing method in semiconductor industry if the issues of the multi electron beam source are addressed. The microcolumns are suitable for the massively parallel electron beam lithography because of their compactness and the ability to achieve high spatial resolution. A new design with varying apertures for our recent nanoscale photoemission source is presented here. Given the easiness of the fabrication of the microcolumn, we optimized the parameters of the design and found that the resolution can be improved by changing the ratio between the diameters of the focus and extractor electrodes.

Fabrication of Pierce-Type Nanocrystalline Si Electron-Emitter Array for Massively Parallel Electron Beam Lithography

2014 ◽  
Vol 134 (6) ◽  
pp. 146-153 ◽  
Author(s):  
Hitoshi Nishino ◽  
Shinya Yoshida ◽  
Akira Kojima ◽  
Nokatsu Ikegami ◽  
Shuji Tanaka ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Massively Parallel ◽  
Electron Emitter ◽  
Emitter Array ◽  
Nanocrystalline Si

Lithography below 100 nm

1983 ◽  
Vol 41 ◽  
pp. 96-99
Author(s):  
L. D. Jackel
Keyword(s):  
Spatial Distribution ◽  
Electron Beam ◽  
Electron Scattering ◽  
Electron Beam Lithography ◽  
Substrate Material ◽  
Local Electron ◽  
Electron Dose ◽  
Positive Resist ◽  
Exposure Process

Most production electron beam lithography systems can pattern minimum features a few tenths of a micron across. Linewidth in these systems is usually limited by the quality of the exposing beam and by electron scattering in the resist and substrate. By using a smaller spot along with exposure techniques that minimize scattering and its effects, laboratory e-beam lithography systems can now make features hundredths of a micron wide on standard substrate material. This talk will outline sane of these high- resolution e-beam lithography techniques.We first consider parameters of the exposure process that limit resolution in organic resists. For concreteness suppose that we have a “positive” resist in which exposing electrons break bonds in the resist molecules thus increasing the exposed resist's solubility in a developer. Ihe attainable resolution is obviously limited by the overall width of the exposing beam, but the spatial distribution of the beam intensity, the beam “profile” , also contributes to the resolution. Depending on the local electron dose, more or less resist bonds are broken resulting in slower or faster dissolution in the developer.

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Salicidation process for submicrometre gate MOSFET fabrication using a resistless electron beam lithography process

1999 ◽  
Vol 35 (15) ◽  
pp. 1283 ◽  
Author(s):  
S. Michel ◽  
E. Lavallée ◽  
J. Beauvais ◽  
J. Mouine
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Lithography Process

scholarly journals Nanooptical elements for visual verification

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Alexander Goncharsky ◽  
Anton Goncharsky ◽  
Dmitry Melnik ◽  
Svyatoslav Durlevich
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Mass Production ◽  
Optical Element ◽  
Visual Image ◽  
Zero Order ◽  
Diffractive Optical Elements ◽  
Optical Elements ◽  
Standard Equipment ◽  
Diffractive Element

AbstractThis paper focuses on the development of flat diffractive optical elements (DOEs) for protecting banknotes, documents, plastic cards, and securities against counterfeiting. A DOE is a flat diffractive element whose microrelief, when illuminated by white light, forms a visual image consisting of several symbols (digits or letters), which move across the optical element when tilted. The images formed by these elements are asymmetric with respect to the zero order. To form these images, the microrelief of a DOE must itself be asymmetric. The microrelief has a depth of ~ 0.3 microns and is shaped with an accuracy of ~ 10–15 nm using electron-beam lithography. The DOEs developed in this work are securely protected against counterfeiting and can be replicated hundreds of millions of times using standard equipment meant for the mass production of relief holograms.

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