Substrate effects on the microsphere photolithography process (Conference Presentation)

2018 ◽  
Author(s):  
Chuang Qu ◽  
Edward C. Kinzel
Keyword(s):  
Substrate Effects ◽  
Photolithography Process

АЛГОРИТМ РАСЧЕТА ОКОН ПРОЦЕССА ФОТОЛИТОГРАФИИ НА ОСНОВЕ МОДЕЛИ РЕЗИСТА С ПОСТОЯННЫМ ПОРОГОМ

2020 ◽  
Vol 96 (3s) ◽  
pp. 756-757
Author(s):  
Е.С. Шамин ◽  
Е.Л. Харченко
Keyword(s):  
Process Window ◽  
Model Generation ◽  
Modeling Tools ◽  
Photolithography Process

Данная работа посвящена описанию возможного алгоритма создания моделей резиста с постоянным порогом и расчета окон процесса на их основе. Приведенные изыскания реализованы в виде программного средства, использующего средства моделирования фотолитографии Mentor Graphics Calibre. This work is dedicated to the description of one of possible algorithms of constant threshold resist model generation used for photolithography process window calculation. This algorithm has been realized in the form of a program using Mentor Graphics Calibre modeling tools.

scholarly journals Substrate effects and evaluation of elastic moduli of components of inhomogeneous films by nanoindentation

2016 ◽  
Vol 619 ◽  
pp. 112-119 ◽  
Author(s):  
E.L. Kossovich ◽  
F.M. Borodich ◽  
S.J. Bull ◽  
S.A. Epshtein
Keyword(s):  
Elastic Moduli ◽  
Substrate Effects

scholarly journals Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Inertial Sensors ◽  
Surface Acoustic Waves ◽  
Sensing Element ◽  
Small Series ◽  
Evaporation Technique ◽  
Photolithography Process

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

Substrate effects on electrical parameters of Dirac fermions in graphene

2021 ◽  
Vol 133 ◽  
pp. 105936
Author(s):  
E. Tiras ◽  
S. Ardali ◽  
H.A. Firat ◽  
E. Arslan ◽  
E. Ozbay
Keyword(s):  
Dirac Fermions ◽  
Electrical Parameters ◽  
Substrate Effects

Direct, Catalytic α-Alkylation of N-Heterocycles by Hydroaminoalkylation: Substrate Effects for Regiodivergent Product Formation

2021 ◽  
Author(s):  
Rebecca C. DiPucchio ◽  
Karst E. Lenzen ◽  
Pargol Daneshmand ◽  
Maria B. Ezhova ◽  
Laurel L. Schafer
Keyword(s):  
Product Formation ◽  
Substrate Effects
Sign in / Sign up

Export Citation Format

Share Document