Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma (Conference Presentation)

2018 ◽  
Author(s):  
Tetsuya Makimura ◽  
Hikari Urai ◽  
Eriko Kira ◽  
Hiroyuki Niino
Keyword(s):  
Wave Optics ◽  
Laser Produced Plasma

High-Voltage Scanning Electron Microscopy

1970 ◽  
Vol 28 ◽  
pp. 6-7
Author(s):  
J. M. Cowley
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Wave Optics ◽  
Contrast Effects ◽  
Transmission Electron ◽  
Mode Of Operation ◽  
Scanning Transmission ◽  
Types Of Information ◽  
Voltage Scanning

The comparison of scanning transmission electron microscopy (STEM) with conventional transmission electron microscopy (CTEM) can best be made by means of the Reciprocity Theorem of wave optics. In Fig. 1 the intensity measured at a point A’ in the CTEM image due to emission from a point B’ in the electron source is equated to the intensity at a point of the detector, B, due to emission from a point A In the source In the STEM. On this basis it can be demonstrated that contrast effects In the two types of instrument will be similar. The reciprocity relationship can be carried further to include the Instrument design and experimental procedures required to obtain particular types of information. For any. mode of operation providing particular information with one type of microscope, the analagous type of operation giving the same information can be postulated for the other type of microscope. Then the choice between the two types of instrument depends on the practical convenience for obtaining the required Information.

Directed inward beams of ions in laser produced plasma

2006 ◽  
Vol 133 ◽  
pp. 525-527
Author(s):  
V. S. Belyaev ◽  
A. Ya. Faenov ◽  
A. I. Magunov ◽  
A. P. Matafonov ◽  
T. A. Pikuz ◽  
...  
Keyword(s):  
Laser Produced Plasma

Some demonstrations in wave optics performed with a Gas laser

1971 ◽  
Vol 105 (10) ◽  
pp. 359-361 ◽  
Author(s):  
O.A. Shustin ◽  
T.S. Velichkina ◽  
L.F. Mikheeva ◽  
Ivan A. Yakovlev
Keyword(s):  
Wave Optics ◽  
Gas Laser

Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source

2020 ◽  
Vol 13 (11) ◽  
pp. 115501
Author(s):  
Yoshiyuki Honda ◽  
Tatsuya Yanagida ◽  
Yutaka Shiraishi ◽  
Masayuki Morita ◽  
Masahiko Andou ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Light Source ◽  
Protective Film ◽  
Morphology Change ◽  
Laser Produced Plasma

Efficient Multi-keV Underdense Laser-Produced Plasma Radiators

2001 ◽  
Vol 87 (27) ◽  
Author(s):  
C. A. Back ◽  
J. Grun ◽  
C. Decker ◽  
L. J. Suter ◽  
J. Davis ◽  
...  
Keyword(s):  
Laser Produced Plasma
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