Microradiography With Laser-Produced Plasma Sources - Surface Roughness on PMMA Resist

1988 ◽  
Author(s):  
P. C. Cheng ◽  
H. Kim ◽  
M. D. Wittman
Keyword(s):  
Surface Roughness ◽  
Plasma Sources ◽  
Laser Produced Plasma

EUV-induced plasmas created using intense ionizing radiation pulses from laser-produced plasma sources

2019 ◽  
Author(s):  
Andrzej S. Bartnik ◽  
Przemyslaw W. Wachulak ◽  
Henryk Fiedorowicz ◽  
Tomasz Fok ◽  
Lukasz Wegrzynski
Keyword(s):  
Ionizing Radiation ◽  
Plasma Sources ◽  
Laser Produced Plasma

Physics of Laser-Produced Plasma Sources of Extreme Ultraviolet Radiation

2018 ◽  
Author(s):  
Oscar Versolato ◽  
Dmitry Kurilovich ◽  
Francesco Torretti ◽  
Ruben Schupp ◽  
Joris Scheers ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

scholarly journals Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 029802-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

13.5nm extreme ultraviolet emission from tin based laser produced plasma sources

2006 ◽  
Vol 99 (9) ◽  
pp. 093302 ◽  
Author(s):  
Paddy Hayden ◽  
Anthony Cummings ◽  
Nicola Murphy ◽  
Gerry O’Sullivan ◽  
Paul Sheridan ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Emission ◽  
Plasma Sources ◽  
Laser Produced Plasma

RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 021112-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

Neutral cluster debris dynamics in droplet-based laser-produced plasma sources

2016 ◽  
Vol 49 (18) ◽  
pp. 185205 ◽  
Author(s):  
Duane Hudgins ◽  
Nadia Gambino ◽  
Bob Rollinger ◽  
Reza Abhari
Keyword(s):  
Neutral Cluster ◽  
Plasma Sources ◽  
Laser Produced Plasma
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