Characterization of a 150-mm long variable line spacing plane grating through interferometry
1994 ◽
Vol 347
(1-3)
◽
pp. 269-272
◽
2007 ◽
Vol 78
(8)
◽
pp. 083109
◽
2011 ◽
Vol 649
(1)
◽
pp. 139-143
◽
Keyword(s):