Large area precision optical coatings by pulse magnetron sputtering

2017 ◽  
Author(s):  
Peter Frach ◽  
Daniel Gloess ◽  
Thomas Goschurny ◽  
Andy Drescher ◽  
Ullrich Hartung ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Optical Coatings ◽  
Large Area ◽  
Pulse Magnetron

Large-area CsPbBr3 perovskite films grown with effective one-step RF-magnetron sputtering

2021 ◽  
Vol 129 (24) ◽  
pp. 245303
Author(s):  
Fan Xu ◽  
Yujiao Li ◽  
Beilei Yuan ◽  
Yongzheng Zhang ◽  
Haoming Wei ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Large Area ◽  
One Step

On‐axis dc magnetron sputtering of large area high quality YBa2Cu3O7superconducting thin films

1992 ◽  
Vol 61 (3) ◽  
pp. 348-350 ◽  
Author(s):  
Y. Z. Zhang ◽  
L. Li ◽  
Y. Y. Zhao ◽  
B. R. Zhao ◽  
J. W. Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Large Area ◽  
High Quality

Optical and mechanical properties of AlF3 films produced by pulse magnetron sputtering of Al targets with CF4/O2 gas

2009 ◽  
Vol 16 (4) ◽  
pp. 505-510 ◽  
Author(s):  
Bo-Huei Liao ◽  
Cheng-Chung Lee ◽  
Cheng-Chung Jaing ◽  
Ming-Chung Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Pulse Magnetron ◽  
Optical And Mechanical Properties

Investigation of surface morphology of thin metal films with magnetic layers Fe-Cr-Co

2021 ◽  
Author(s):  
V.S. Zayonchkovsky ◽  
Aung Kyaw Kyaw ◽  
A.V. Andreev
Keyword(s):  
Atomic Force Microscopy ◽  
Magnetron Sputtering ◽  
Electron Microscopic Examination ◽  
Nearest Neighbors ◽  
Substrate Plane ◽  
Large Area ◽  
Electron Microscopic ◽  
Force Microscopy ◽  
Atomic Force ◽  
Large Projection

Films containing layers of dispersion-hardening alloys (LDHA) based on the Fe-Cr-Co system were obtained by magnetron sputtering. LDHA acquire the properties of film permanent magnets after a single-stage «fast» high-vacuum annealing. Bulk materials acquire such properties only after many hours of multi-stage heat treatment. The film samples acquire these properties in tens of seconds. The morphology of their surface was studied to determine the origin of the coercive force of film samples. The surface morphology was studied using high resolution scanning electron microscopy and atomic force microscopy. We studied two compositions that, in bulk, have a different tendency to form many phases during crystallization. In magnetron sputtering, the alloy in which a multiphase state is easily formed is polycrystalline. The antipode alloy in magnetron sputtering is realized in an amorphous state. After annealing, both alloys are in a polycrystalline state. Electron microscopic examination showed that as a result of annealing, crystallites are formed with a large projection onto the substrate plane, which grow due to the nearest neighbors. Moreover, these crystallites have not only a large area, but also a height. After annealing, both alloys are in a polycrystalline state. Electron microscopic examination showed that as a result of annealing, crystallites are formed with a large projection onto the substrate plane, which grow due to the nearest neighbors. Moreover, these crystallites have not only a large area, but also a height. What is determined by atomic force microscopy. High crystallites are also faceted. This may indicate that the composition of these crystallites differs from the composition of the surrounding layer, which may be the reason for the increase in coercive force as a result of annealing.

Deposition of multilayer optical coatings using closed-field magnetron sputtering

2006 ◽  
Author(s):  
D. R. Gibson ◽  
I. Brinkley ◽  
G. W. Hall ◽  
E. M. Waddell ◽  
J. M. Walls
Keyword(s):  
Magnetron Sputtering ◽  
Optical Coatings ◽  
Closed Field

Corrigendum: Viable route towards large-area 2D MoS 2 using magnetron sputtering (2017 2D Mater . 4 021002)

2D Materials ◽  
2017 ◽  
Vol 4 (3) ◽  
pp. 039502
Author(s):  
Hassana Samassekou ◽  
Asma Alkabsh ◽  
Milinda Wasala ◽  
Miller Eaton ◽  
Aaron Walber ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Large Area
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