High throughput and dense sampling metrology for process control

2017 ◽  
Author(s):  
Lei Sun ◽  
Tsunehito Kohyama ◽  
Kuniaki Takeda ◽  
Hiroto Nozawa ◽  
Yuji Asakawa ◽  
...  
Keyword(s):  
Process Control ◽  
High Throughput ◽  
Dense Sampling

Ultra-Fast In-Line Inspection for 3D SIC TSV Line - Bonding & Thinning

2012 ◽  
Vol 187 ◽  
pp. 259-264
Author(s):  
Pierre Yves Guittet ◽  
Lars Markwort ◽  
Greg Savage ◽  
Sandip Halder ◽  
Anne Jourdain
Keyword(s):  
Process Control ◽  
High Throughput ◽  
New Technologies ◽  
Consumer Products ◽  
Yield Management ◽  
Defect Classification ◽  
Control Methods ◽  
Production Lines ◽  
Volume Output

The number of consumer products requiring 3D stacked IC (3D SIC) is growing, and volume output is expected to start between 2011 and 2013. R&D centers and production sites are addressing the remaining obstacles to production for these new technologies. To enable fast production ramp, there is urgency to get enablers in place, including advanced, dedicated process control methods. Using an innovative high throughput inspection technology, we show ways to control future 3D SIC production lines, getting data from 100% of the wafers and providing defect classification for yield management.

154: Integration of TPSA and High-Throughput Mass Spectrometry Data Improves Prostate Cancer Prediction

2007 ◽  
Vol 177 (4S) ◽  
pp. 52-53
Author(s):  
Stefano Ongarello ◽  
Eberhard Steiner ◽  
Regina Achleitner ◽  
Isabel Feuerstein ◽  
Birgit Stenzel ◽  
...  
Keyword(s):  
Prostate Cancer ◽  
Mass Spectrometry ◽  
High Throughput ◽  
Mass Spectrometry Data ◽  
Cancer Prediction

INSTRUMENTATION - Mass Spectrometry Process Control

1956 ◽  
Vol 48 (2) ◽  
pp. 81-84
Author(s):  
William Priestley ◽  
B. Dudenbostel, Jr.
Keyword(s):  
Mass Spectrometry ◽  
Process Control
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