Enhancing EUV mask blanks usability through smart shift and blank-design pairing optimization
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2014 ◽
Vol 72
(9-12)
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pp. 1161-1173
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2009 ◽
Vol 224
(1)
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pp. 75-86
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2009 ◽
Vol 36
(6)
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pp. 462-469
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1999 ◽
Vol 14
(4)
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pp. 350-357
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2000 ◽
Vol 123
(4)
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pp. 468-475
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2011 ◽
Vol 314-316
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pp. 594-598
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2009 ◽
Vol 223
(10)
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pp. 1323-1330
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