Estimation of optimal conditions for laser beam focusing in a turbulent atmosphere from a target image

Author(s):  
Vadim V. Dudorov ◽  
Anna S. Eremina
Author(s):  
Frank S. Arnold

Abstract To be better prepared to use laser based failure isolation techniques on field failures of complex integrated circuits, simple test structures without any failures can be used to study Optical Beam Induced Resistance Change (OBIRCH) results. In this article, four case studies are presented on the following test structures: metal strap, contact string, VIA string, and comb test structure. Several experiments were done to investigate why an OBIRCH image was seen in certain areas of a VIA string and not in others. One experiment showed the OBRICH variation was not related to the cooling and heating effects of the topology, or laser beam focusing. A 4 point probe resistance measurement and cross-sectional views correlated with the OBIRCH results and proved OBIRCH was able to detect a variation in VIA fabrication.


2021 ◽  
Vol 1865 (2) ◽  
pp. 022004
Author(s):  
Chunyan Yang ◽  
Yun Hao ◽  
Yangping Li ◽  
Bozhe Wang ◽  
Hai Yuan ◽  
...  

1971 ◽  
Vol 49 (10) ◽  
pp. 1233-1248 ◽  
Author(s):  
A. D. Varvatsis ◽  
M. I. Sancer

This work examines the expansion of a focused laser beam in the turbulent atmosphere. The formulation is based on Green's theorem and the valid assumption that the turbulent atmosphere is a forward-scatter medium for wavelengths of interest (0.6 μ < λ < 11 μ). The main results are: (1) the spot size at the free-space focal plane in the presence of turbulence is independent of the aperture radius, and is only weakly dependent on the wavelength, (2) the focal plane can be significantly shifted for small aperture radii, short wavelengths, and long free-space focal lengths, (3) the effect of the atmosphere is pronounced only close to the free-space focus and very far away, and (4) the turbulent atmosphere has a stronger effect on weakly focused beams rather than strongly focused beams, except very close to the free-space focus, where the effect is more pronounced for strongly focused beams.


2017 ◽  
Author(s):  
Ilya Galaktionov ◽  
Alexis Kudryashov ◽  
Julia Sheldakova ◽  
Alexander Nikitin

2009 ◽  
Vol 58 (7) ◽  
pp. 5098
Author(s):  
Zheng Wei-Wei ◽  
Wang Li-Qin ◽  
Xu Jing-Ping ◽  
Wang Li-Gang

1988 ◽  
Vol 27 (17) ◽  
pp. 3704 ◽  
Author(s):  
A. G. Borovoy ◽  
G. Ya. Patrushev ◽  
A. I. Petrov

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