Characterization of microwave plasma CVD of diamond by mass analysis and optical emission spectroscopy

Mapping Intimacies ◽

10.1117/12.22447 ◽

1990 ◽

Cited By ~ 3

Author(s):

Wayne A. Weimer ◽

Curtis E. Johnson

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Plasma ◽

Optical Emission ◽

Mass Analysis ◽

Plasma Cvd ◽

Microwave Plasma Cvd

Download Full-text

Microwave plasma chemical vapour deposition of tetramethylsilane: correlations between optical emission spectroscopy and film characteristics

Surface and Coatings Technology ◽

10.1016/s0257-8972(01)01081-7 ◽

2001 ◽

Vol 142-144 ◽

pp. 314-320 ◽

Cited By ~ 40

Author(s):

L. Thomas ◽

L. Maillé ◽

J.M. Badie ◽

M. Ducarroir

Keyword(s):

Chemical Vapour Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Optical Emission ◽

Plasma Chemical ◽

Plasma Chemical Vapour Deposition ◽

Film Characteristics

Download Full-text

Remote Microwave Plasma Enhanced Chemical Vapour Deposition of Amorphous Carbon : Optical Emission Spectroscopy Characterisation of the Afterglow and Growth Rates

Journal de Physique IV (Proceedings) ◽

10.1051/jphyscol:1995570 ◽

1995 ◽

Vol 05 (C5) ◽

pp. C5-593-C5-600 ◽

Cited By ~ 1

Author(s):

C. Tixier ◽

P. Tristant ◽

J. Desmaison ◽

D. Merle

Keyword(s):

Chemical Vapour Deposition ◽

Amorphous Carbon ◽

Growth Rates ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Optical Emission

Download Full-text

Characterization of a CH4-RF-plasma by ion flux, Langmuir probe, and optical emission spectroscopy measurements

Diamond and Related Materials ◽

10.1016/0925-9635(92)90010-l ◽

1992 ◽

Vol 1 (2-4) ◽

pp. 121-126 ◽

Cited By ~ 19

Author(s):

M. Weiler ◽

R. Kleber ◽

K. Jung ◽

H. Ehrhardt

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Flux ◽

Rf Plasma

Download Full-text

Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Applied Surface Science ◽

10.1016/j.apsusc.2018.02.185 ◽

2018 ◽

Vol 442 ◽

pp. 412-416 ◽

Cited By ~ 12

Author(s):

Shiva Mohajernia ◽

Anca Mazare ◽

Imgon Hwang ◽

Sofia Gaiaschi ◽

Patrick Chapon ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Tio2 Nanotubes ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge ◽

Elemental Characterization

Download Full-text

Applicability of optical emission spectroscopy techniques for characterization of Ar and Ar/O2 discharges

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/abf61c ◽

2021 ◽

Vol 54 (27) ◽

pp. 275203

Author(s):

M Nikolić ◽

I Sepulveda ◽

C Gonzalez ◽

N Khogeer ◽

M Fernandez-Monteith

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission

Download Full-text

Experimental characterization of argon/air mixture microwave plasmas using optical emission spectroscopy

Journal of Molecular Spectroscopy ◽

10.1016/j.jms.2020.111278 ◽

2020 ◽

Vol 370 ◽

pp. 111278 ◽

Cited By ~ 1

Author(s):

Sébastien Rassou ◽

Alain Piquemal ◽

Nofel Merbahi ◽

Fréderic Marchal ◽

Mohammed Yousfi

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Experimental Characterization ◽

Microwave Plasmas

Download Full-text

Optical Emission Spectroscopy and Laser Doppler Velocimetry for an RF Thermal Plasma CVD Process

MRS Proceedings ◽

10.1557/proc-190-89 ◽

1990 ◽

Vol 190 ◽

Author(s):

T. Ishigaki ◽

Y. Moriyoshi ◽

I. Iwamoto

Keyword(s):

Thermal Plasma ◽

Emission Spectroscopy ◽

Laser Doppler Velocimetry ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Laser Doppler ◽

Doppler Velocimetry ◽

Plasma Cvd ◽

Rf Thermal Plasma

Download Full-text

Characterization of the diamond growth process using optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.363944 ◽

1997 ◽

Vol 81 (6) ◽

pp. 2856-2862 ◽

Cited By ~ 25

Author(s):

Jingbiao Cui ◽

Rongchuan Fang

Keyword(s):

Emission Spectroscopy ◽

Growth Process ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Diamond Growth

Download Full-text

Characterization of Glowing Contacts using Optical Emission Spectroscopy

Electrical Contacts - 2007 Proceedings of the 53rd IEEE Holm Conference on Electrical Contacts ◽

10.1109/holm.2007.4318201 ◽

2007 ◽

Cited By ~ 4

Author(s):

Xin Zhou ◽

John Shea

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission

Download Full-text

Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy

Plasma Science and Technology ◽

10.1088/2058-6272/ab84e2 ◽

2020 ◽

Vol 22 (6) ◽

pp. 065404

Author(s):

Fengdong JIA ◽

Yong WU ◽

Qi MIN ◽

Maogen SU ◽

Keigo TAKEDA ◽

...

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Laser Scattering ◽

Ar Plasma ◽

Non Equilibrium

Download Full-text