Characterization of the diamond growth process using optical emission spectroscopy

Jingbiao Cui; Rongchuan Fang

doi:10.1063/1.363944

Characterization of the diamond growth process using optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.363944 ◽

1997 ◽

Vol 81 (6) ◽

pp. 2856-2862 ◽

Cited By ~ 25

Author(s):

Jingbiao Cui ◽

Rongchuan Fang

Keyword(s):

Emission Spectroscopy ◽

Growth Process ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Diamond Growth

Download Full-text

Characterization of a CH4-RF-plasma by ion flux, Langmuir probe, and optical emission spectroscopy measurements

Diamond and Related Materials ◽

10.1016/0925-9635(92)90010-l ◽

1992 ◽

Vol 1 (2-4) ◽

pp. 121-126 ◽

Cited By ~ 19

Author(s):

M. Weiler ◽

R. Kleber ◽

K. Jung ◽

H. Ehrhardt

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Flux ◽

Rf Plasma

Download Full-text

Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Applied Surface Science ◽

10.1016/j.apsusc.2018.02.185 ◽

2018 ◽

Vol 442 ◽

pp. 412-416 ◽

Cited By ~ 12

Author(s):

Shiva Mohajernia ◽

Anca Mazare ◽

Imgon Hwang ◽

Sofia Gaiaschi ◽

Patrick Chapon ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Tio2 Nanotubes ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge ◽

Elemental Characterization

Download Full-text

Applicability of optical emission spectroscopy techniques for characterization of Ar and Ar/O2 discharges

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/abf61c ◽

2021 ◽

Vol 54 (27) ◽

pp. 275203

Author(s):

M Nikolić ◽

I Sepulveda ◽

C Gonzalez ◽

N Khogeer ◽

M Fernandez-Monteith

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission

Download Full-text

Experimental characterization of argon/air mixture microwave plasmas using optical emission spectroscopy

Journal of Molecular Spectroscopy ◽

10.1016/j.jms.2020.111278 ◽

2020 ◽

Vol 370 ◽

pp. 111278 ◽

Cited By ~ 1

Author(s):

Sébastien Rassou ◽

Alain Piquemal ◽

Nofel Merbahi ◽

Fréderic Marchal ◽

Mohammed Yousfi

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Experimental Characterization ◽

Microwave Plasmas

Download Full-text

Characterization of Glowing Contacts using Optical Emission Spectroscopy

Electrical Contacts - 2007 Proceedings of the 53rd IEEE Holm Conference on Electrical Contacts ◽

10.1109/holm.2007.4318201 ◽

2007 ◽

Cited By ~ 4

Author(s):

Xin Zhou ◽

John Shea

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission

Download Full-text

Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy

Plasma Science and Technology ◽

10.1088/2058-6272/ab84e2 ◽

2020 ◽

Vol 22 (6) ◽

pp. 065404

Author(s):

Fengdong JIA ◽

Yong WU ◽

Qi MIN ◽

Maogen SU ◽

Keigo TAKEDA ◽

...

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Laser Scattering ◽

Ar Plasma ◽

Non Equilibrium

Download Full-text

Optical emission spectroscopy characterization of oxygen plasma during degradation of Escherichia coli

Journal of Applied Physics ◽

10.1063/1.2732693 ◽

2007 ◽

Vol 101 (10) ◽

pp. 103305 ◽

Cited By ~ 43

Author(s):

D. Vujošević ◽

M. Mozetič ◽

U. Cvelbar ◽

N. Krstulović ◽

S. Milošević

Keyword(s):

Escherichia Coli ◽

Emission Spectroscopy ◽

Oxygen Plasma ◽

Optical Emission Spectroscopy ◽

Optical Emission

Download Full-text

The growth process and optical emission spectroscopy of amorphous silicon carbide films from methyltrichlorosilane by rf plasma enhanced CVD

Surface and Coatings Technology ◽

10.1016/s0257-8972(01)01078-7 ◽

2001 ◽

Vol 142-144 ◽

pp. 360-364 ◽

Cited By ~ 6

Author(s):

Tsutomu Kaneko ◽

Noriaki Miyakawa ◽

Hayato Sone ◽

Hiroyosi Yamazakia

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Emission Spectroscopy ◽

Growth Process ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Rf Plasma ◽

Amorphous Silicon Carbide ◽

Plasma Enhanced Cvd

Download Full-text

Characterization of Cd1−x Mg x Te film and plasma diagnostic studies by optical emission spectroscopy during sputtering

Applied Physics B ◽

10.1007/s00340-009-3504-1 ◽

2009 ◽

Vol 95 (4) ◽

pp. 787-794 ◽

Cited By ~ 2

Author(s):

S. Gupta ◽

A. D. Compaan

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Plasma Diagnostic ◽

Diagnostic Studies

Download Full-text

Characterization of Ar/Cu electron‐cyclotron‐resonance plasmas using optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.363177 ◽

1996 ◽

Vol 80 (5) ◽

pp. 2605-2613 ◽

Cited By ~ 10

Author(s):

R. L. Rhoades ◽

S. M. Gorbatkin

Keyword(s):

Cyclotron Resonance ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electron Cyclotron Resonance ◽

Optical Emission ◽

Electron Cyclotron

Download Full-text