KrF excimer laser deposition of diamond-like carbon films with germanium interlayers

1990 ◽  
Author(s):  
Richard T. Demers ◽  
Dennis G. Harris
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Krf Excimer Laser

Optical emission study of ablation plasma plume in the preparation of diamond-like carbon films by KrF excimer laser

1999 ◽  
Vol 86 (8) ◽  
pp. 4154-4159 ◽  
Author(s):  
Y. Yamagata ◽  
A. Sharma ◽  
J. Narayan ◽  
R. M. Mayo ◽  
J. W. Newman ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Plasma Plume ◽  
Optical Emission ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Ablation Plasma ◽  
Emission Study ◽  
Krf Excimer Laser ◽  
Ablation Plasma Plume

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser
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