Optical emission study of ablation plasma plume in the preparation of diamond-like carbon films by KrF excimer laser

1999 ◽  
Vol 86 (8) ◽  
pp. 4154-4159 ◽  
Author(s):  
Y. Yamagata ◽  
A. Sharma ◽  
J. Narayan ◽  
R. M. Mayo ◽  
J. W. Newman ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Plasma Plume ◽  
Optical Emission ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Ablation Plasma ◽  
Emission Study ◽  
Krf Excimer Laser ◽  
Ablation Plasma Plume

Laser Induced Fluorescence Measurement Of Plasma Plume During Pulsed Laser Deposition Of Diamond-Like Carbon

2000 ◽  
Vol 617 ◽  
Author(s):  
Yukihiko Yamagata ◽  
Yuji Kozai ◽  
Fumiaki Mitsugi ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Plasma Plume ◽  
Laser Energy ◽  
Pulsed Laser ◽  
Laser Induced Fluorescence ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Fluorescence Measurement ◽  
Ablation Plasma ◽  
Ablation Plasma Plume

AbstractDynamics of carbon ablation plasma plume during the preparation of diamond-like carbon films by KrF excimer pulsed laser deposition was investigated using laser induced fluorescence (LIF) and optical emission spectroscopy. LIF signal from C2molecule (Swan band, d 3Φg – a3Φu) was detected using a photomultiplier tube and an intensified CCD camera. Temporal evolution and spatial distribution of C2 molecules in the ablated plume were measured as a function of laser energy density and ablation area. LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that some of C2molecules are dissociated by collision with energetic species in central part of the ablation plume. Dynamics of ablation plasma plume is strongly dependent on the size of ablated area.

KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser
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