Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry

Jing-tao Dong; Rong-sheng Lu

doi:10.1364/ao.51.005668

Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry

Applied Optics ◽

10.1364/ao.51.005668 ◽

2012 ◽

Vol 51 (23) ◽

pp. 5668 ◽

Cited By ~ 20

Author(s):

Jing-tao Dong ◽

Rong-sheng Lu

Keyword(s):

Thin Film ◽

Sensitivity Analysis ◽

Film Thickness ◽

White Light ◽

Thickness Measurement ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Scanning White Light Interferometry ◽

Film Thickness Measurement

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Study of thin film thickness measurement based on white light interference

10.1117/12.2257412 ◽

2017 ◽

Author(s):

Yuanbo Zheng ◽

Chunxiao Chu ◽

Xia Wang

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Light Interference ◽

White Light Interference ◽

Film Thickness Measurement

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Initial estimation of thin film thickness measurement based on white light spectral interferometry

Thin Solid Films ◽

10.1016/j.tsf.2016.06.025 ◽

2016 ◽

Vol 612 ◽

pp. 267-273 ◽

Cited By ~ 5

Author(s):

Tong Guo ◽

Juhong Wu ◽

Lianfeng Ni ◽

Xing Fu ◽

Xiaotang Hu

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Spectral Interferometry ◽

Film Thickness Measurement

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Thin film thickness measurements using Scanning White Light Interferometry

Thin Solid Films ◽

10.1016/j.tsf.2013.10.005 ◽

2014 ◽

Vol 550 ◽

pp. 10-16 ◽

Cited By ~ 30

Author(s):

B. Maniscalco ◽

P.M. Kaminski ◽

J.M. Walls

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Scanning White Light Interferometry ◽

Thickness Measurements

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Multilayer thin film thickness measurement using sensitivity separation method

Optics Communications ◽

10.1016/j.optcom.2010.05.054 ◽

2010 ◽

Vol 283 (20) ◽

pp. 3989-3993 ◽

Cited By ~ 3

Author(s):

Xing-zhi Gong ◽

Liang Cheng ◽

Fei-hong Yu

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Separation Method ◽

Multilayer Thin Film ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Spectroscopic thin film thickness measurement system for semiconductor industries

Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) ◽

10.1109/imtc.1994.352008 ◽

2002 ◽

Cited By ~ 2

Author(s):

M. Horie ◽

N. Fujiwara ◽

M. Kokubo ◽

N. Kondo

Keyword(s):

Thin Film ◽

Film Thickness ◽

Measurement System ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement ◽

Thickness Measurement System

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Novel wide-angle ellipsometric arrangement for thin film thickness measurement

Journal of Physics Communications ◽

10.1088/2399-6528/aac084 ◽

2018 ◽

Vol 2 (5) ◽

pp. 055007

Author(s):

A W Abdallah ◽

R Tutsch ◽

N N Nagib

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Wide Angle ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Processing technology of interferogram for thin film thickness measurement

10.1117/12.837583 ◽

2009 ◽

Author(s):

Jun-hong Su ◽

Jin-man Ge

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Processing Technology ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Combined thin-film thickness measurement and surface metrology of photovoltaic thin films using Coherence Correlation Interferometry

2012 38th IEEE Photovoltaic Specialists Conference ◽

10.1109/pvsc.2012.6317648 ◽

2012 ◽

Author(s):

Biancamaria Maniscalco ◽

Piotr M. Kaminski ◽

John M. Walls

Keyword(s):

Thin Film ◽

Thin Films ◽

Film Thickness ◽

Thickness Measurement ◽

Surface Metrology ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Application of optical spectral interferometry for thin film thickness measurement

2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) ◽

10.1109/msmw.2016.7538130 ◽

2016 ◽

Author(s):

Konstantin A. Lukin ◽

Dmytro N. Tatyanko ◽

Alona B. Pikh

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Spectral Interferometry ◽

Film Thickness Measurement

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Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

Optics Express ◽

10.1364/oe.14.011885 ◽

2006 ◽

Vol 14 (24) ◽

pp. 11885 ◽

Cited By ~ 62

Author(s):

Young-Sik Ghim ◽

Seung-Woo Kim

Keyword(s):

Thin Film ◽

Refractive Index ◽

Film Thickness ◽

White Light ◽

White Light Interferometry ◽

Thin Film Thickness ◽

Thickness Profile

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