Inhibiting device degradation induced by surface damages during top-down fabrication of semiconductor devices with micro/nano-scale pillars and holes

Author(s):  
Ahmed S. Mayet ◽  
Hilal Cansizoglu ◽  
Yang Gao ◽  
Ahmet Kaya ◽  
Soroush Ghandiparsi ◽  
...  
2008 ◽  
Vol 79 (4) ◽  
pp. 1086-1095 ◽  
Author(s):  
Alexander I. Fedoseyev ◽  
Marek Turowski ◽  
Michael L. Alles ◽  
Robert A. Weller

2003 ◽  
Vol 69 (2-4) ◽  
pp. 577-586 ◽  
Author(s):  
Alex Fedoseyev ◽  
Vladimir Kolobov ◽  
Robert Arslanbekov ◽  
Andrzej Przekwas

2021 ◽  
Vol 3 (1) ◽  
Author(s):  
Ordin S.V.

The ancient emission formulas of Langmuir and Richardson entered thecalculations of subtle effects in semiconductor devices as basic ones.But, in the physics of semiconductor devices, these models have longplayed a purely decorative role, since they can describe in the most roughapproximation only individual sections of the I �?V characteristic. But it isprecisely the fact that these formulas are basic when describing the barriercurrent-voltage characteristics (CVC) and prevented the consideration anduse of thermoelectric effects in materials on a nano-scale. Thus, as thesebasic emission models actually imposed a ban on the MEASURABILITYof local thermoelectric effects, the existence of which has already beenproven both phenomenologically and experimentally.The quantum transition technique is based on classical models. But itcan also be used to correct these classic formulas. The calculation of thespatial transition of electrons over the potential barrier, taking into accountthe polarity of the kinetic energy, gives currents that are significantlyhigher than the currents of Langmuir and Richardson, including in theinitial section of the I �?V characteristic. Moreover, ballistic currentsare concentrated at energy levels close to the threshold. This effectof condensation of electrons flowing down the barrier transforms the"anomalous" Seebeck coefficients into normal MEASURABLE LocalThermal EMF, including in p-n junctions.


Author(s):  
Khe C. Nguyen ◽  
Sinh T. Do ◽  
Thong V. De

In the present report, we conducted the study of chemical top down process which seems to provide better efficiency and better cost saving than the physical top down in the fabrication of nano scale, especially, when applying to carbon materials. It is found that the chemical top down performs effectively with multiple attachments of electrolytic groups onto the surface of the carbon powder by diazo coupling reaction. As a result, we are able to isolate the nano scale of carbon particles with strong polar solvents such as water and believe that it is due to electrostatic repulsive force between same sign charges existing in the polarized electrolytic groups... The cleavage of azo bond in a naked carbon product can occur above 110oC in ambient condition but can also escape by a nano composite structure using specific emulsion polymer as binder matrix. Electrolytic groups carry charge from ionization are proven to reduce electron transport but enhance proton transport capability of carbon material, have successfully demonstrated a proton exchange membrane (PEM) which exhibits better heat resistance and higher current density than the commercial Nafion product in the PEM fuel cell application. The diazo coupling product of carbon exhibits a core-shell structure composed of a nano scale hydrophobic core and electrolytic shell, showing apparent “solubility” and named as “liquid” nano carbon (LNC).


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