GaN nanowire tip for high aspect ratio nano-scale AFM metrology (Conference Presentation)

Author(s):  
Mahmoud Behzadirad ◽  
Noel Dawson ◽  
Mohsen Nami ◽  
Ashwin K. Rishinaramangalam ◽  
Daniel F. Feezell ◽  
...  
Author(s):  
Takahiro Arakawa ◽  
Hiroyuki Kusakawa ◽  
Shuichi Shoji

2005 ◽  
Vol 863 ◽  
Author(s):  
Wei Chen ◽  
Sheng Wang ◽  
Ather Ashraf ◽  
Edward Somerville ◽  
Gerard Nowaczyk ◽  
...  

AbstractThis communication describes the results of a potential spin-on glass (SOG) solution for narrow and high aspect ratio trench fill in both shallow trench isolation (STI) and premetal dielectric (PMD) applications. We have focused our development work on a hydrogen silsesquioxane (HSQ, (HSiO3/2)n) material, which offers the advantage of a carbon free gap fill solution. The main challenge for carbon-free SOG materials is to achieve material densification in the nano-scale gaps during thermal processing that of the gap filled material during the wet cleaning steps. This paper reports some approaches and findings on material densification in the nano-scale gaps and the results of subsequent wet etch tests.


Author(s):  
Joshua A. Varischetti ◽  
Jae-Soon Jang ◽  
Jonghwan Suhr

Recent advances in the production and wide scale availability of nano scale constituents, coupled with ongoing fundamental research utilizing them as fillers in host matrices for a variety of specific engineering inquiries has led to a notable interest in the use of nano scale fillers for specific commercial applications, specifically in the aerospace industry. Damping is of particular importance in modern composites, having high stiffness and low density, damping becomes a large issue, both for structural integrity as well as noise attenuation. The largest obstacle which must first be overcome in order to incorporate the nano scale constituents in commercial applications is the development of design useful modeling and analysis techniques which allow for calculated design decisions based on constituent properties. Currently, there is a large gap in performance of nano structured composites, where in the current analysis techniques tend to overstate the performance achieved relative to experimental results. This discrepancy has been attributed to a number of factors ranging from non-perfect geometry, to issues at the interface between matrix and filler, however there has not yet been a detailed investigation to the ability to accurately predict composite viscoelastic performance based on constituent properties. On of the most common approaches to modeling high aspect ratio nano fillers, carbon nano tubes and carbon nano fibers, is to assume a perfect cylindrical geometry, even though it is well understood that these fillers can have a significant curvature or waviness to them. This investigation combines modeling work looking at the effect of the waviness and the resulting reinforcement provided, in terms of viscoelastic response, which is then compared to experimental results. Damping is characterized with respect to operating temperatures and frequency range, of specific interest is the low frequency range, which is traditionally more difficult to damp. Experimental investigations utilize dynamic mechanical analysis (DMA) to characterize viscoelastic performance, which is then compared to modeling data where it has been found that trends can be accurately predicted.


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