ISERM: in-situ etch rate measurement system

2016 ◽  
Author(s):  
S. Gürtler ◽  
M. Georges ◽  
C. Schikora
Keyword(s):  
Measurement System ◽  
Etch Rate ◽  
Rate Measurement

An Extended Kalman Filter Based Method for Fast In-Situ Etch Rate Measurements

1995 ◽  
Vol 406 ◽  
Author(s):  
T. L. Vincent ◽  
P. P. Khargonekar ◽  
F. L. Terry
Keyword(s):  
Kalman Filtering ◽  
High Speed ◽  
Etch Rate ◽  
Rate Measurement ◽  
Extended Kalman Filtering ◽  
Control Applications ◽  
Suitable Candidate ◽  
Multiple Wavelength ◽  
Speed Advantage

AbstractThe goal of this paper is the presentation of a new algorithm for determining etch rate from single or multiple wavelength reflectometry data. This algorithm is based on techniques from recursive nonlinear estimation theory — Extended Kalman Filtering. A major advantage of our algorithm is extremely high speed. Consequently, it can be used in real-time feedback control applications. The speed advantage also makes it a suitable candidate for full wafer high speed etch rate measurement.

scholarly journals Monitoring of compliance with fuel sulfur content regulations through unmanned aerial vehicle (UAV) measurements of ship emissions

2019 ◽  
Vol 12 (11) ◽  
pp. 6113-6124 ◽  
Author(s):  
Fan Zhou ◽  
Shengda Pan ◽  
Wei Chen ◽  
Xunpeng Ni ◽  
Bowen An
Keyword(s):  
Unmanned Aerial Vehicle ◽  
Sulfur Content ◽  
Measurement System ◽  
Yangtze River Delta ◽  
Exhaust Gas ◽  
Ship Emissions ◽  
Chemical Examination ◽  
Airborne Measurements ◽  
Aerial Vehicle

Abstract. Air pollution from ship exhaust gas can be reduced by the establishment of emission control areas (ECAs). Efficient supervision of ship emissions is currently a major concern of maritime authorities. In this study, a measurement system for exhaust gas from ships based on an unmanned aerial vehicle (UAV) was designed and developed. Sensors were mounted on the UAV to measure the concentrations of SO2 and CO2 in order to calculate the fuel sulfur content (FSC) of ships. The Waigaoqiao port in the Yangtze River Delta, an ECA in China, was selected for monitoring compliance with FSC regulations. Unlike in situ or airborne measurements, the proposed measurement system could be used to determine the smoke plume at about 5 m from the funnel mouth of ships, thus providing a means for estimating the FSC of ships. In order to verify the accuracy of these measurements, fuel samples were collected at the same time and sent to the laboratory for chemical examination, and these two types of measurements were compared. After 23 comparative experiments, the results showed that, in general, the deviation of the estimated value for FSC was less than 0.03 % (m/m) at an FSC level ranging from 0.035 % (m/m) to 0.24 % (m/m). Hence, UAV measurements can be used for monitoring of ECAs for compliance with FSC regulations.

Verification of In Situ Thresholds and Integrated Real-Ear Measurements

2010 ◽  
Vol 21 (10) ◽  
pp. 663-670 ◽  
Author(s):  
Jeffrey J. DiGiovanni ◽  
Ryan M. Pratt
Keyword(s):  
Measurement System ◽  
Hearing Aids ◽  
Hearing Aid ◽  
Normal Hearing ◽  
Analysis Tool ◽  
Ohio University ◽  
Positive Direction ◽  
Significant Difference ◽  
Threshold Measurement

Background: Accurate prescriptive gain results in a more accurate fit, lower return rate in hearing aids, and increased patient satisfaction. In situ threshold measurements can be used to determine required gain. The Widex Corporation uses an in situ threshold measurement strategy, called the Sensogram. Real-ear measurements determine if prescriptive gain targets have been achieved. Starkey Laboratories introduced an integrated real-ear measurement system in their hearing aids. Purpose: To determine whether the responses obtained using the Widex Sensogram were equivalent to those obtained using current clinical threshold measurement methods. To determine the accuracy of the Starkey IREMS™ (Integrated Real Ear Measurement System) in measuring RECD (real-ear to coupler difference) values compared to a dedicated real-ear measurement system. Research Design: A verification design was employed by comparing participant data measured from standard, benchmark equipment and procedures against new techniques offered by hearing-aid manufacturers. Study Sample: A total of 20 participants participated in this study. Ten participants with sensorineural hearing loss were recruited from the Ohio University Hearing, Speech, and Language Clinic participated in the first experiment. Ten participants with normal hearing were recruited from the student population at Ohio University participated in both experiments. The normal-hearing group had thresholds of 15 dB HL or better at the octave frequencies of 250–8000 Hz. The hearing-impaired group had thresholds of varying degrees and configurations with thresholds equal to or poorer than 25 dB HL three-frequency pure-tone average. Data Collection and Analysis: The order of measurement method for both experiments was counterbalanced. In Experiment 1, thresholds obtained via the Widex Sensogram were compared to thresholds obtained for each participant using a clinical audiometer and ER-3A insert ear phones. In Experiment 2, RECD values obtained via the Starkey IREMS were compared to RECD values obtained via the Audioscan Verifit™. A repeated-measures analysis of variance (ANOVA) was used for statistical analysis, and a Fisher's LSD (least significant difference) was used as a post hoc analysis tool. Results: A significant difference between Sensogram thresholds and conventional audiometric thresholds was found with the Sensogram method resulting in better threshold values at 0.5, 1.0, and 2.0 kHz for both groups. In Experiment 2, a significant difference between RECD values obtained by the Starkey IREMS and the Audioscan Verifit system was found with significant differences in RECD values found at 0.25, 0.5, 0.75, 1.5, 2.0, and 6.0 kHz. Conclusions: The Sensogram data differ significantly from traditional audiometry at several frequencies important for speech intelligibility. Real-ear measures are still required for verification of prescribed gain, however, calling into question any claims of shortened fitting time. The Starkey IREMS does perform real-ear measurements that vary significantly from benchmark equipment. These technologies represent a positive direction in prescribing accurate gain during hearing-aid fittings, but a stand-alone system is still the preferred method for real-ear measurements in hearing-aid fittings.

Invariant method for measuring wet gas flow rate

2021 ◽  
pp. 13-19
Author(s):  
Zhanat А. Dayev ◽  
Gulzhan E. Shopanova ◽  
Bakytgul А. Toksanbaeva
Keyword(s):  
Flow Rate ◽  
Measurement System ◽  
Flow Measurement ◽  
Gas Flow ◽  
Test Results ◽  
Invariant System ◽  
Rate Measurement ◽  
Gas Flow Rate ◽  
Flow Rate Measurement ◽  
Wet Gas

The article deals with one of the important tasks of modern flow measurement, which is related to the measurement of the flow rate and the amount of wet gas. This task becomes especially important when it becomes necessary to obtain information about the separate amount of the dry part of the gas that is contained in the form of a mixture in the wet gas stream. The paper presents the principle of operation and structure of the invariant system for measuring the flow rate of wet gas, which is based on the combined use of differential pressure flowmeters and Coriolis flowmeters. The operation of the invariant wet gas flow rate measurement system is based on the simultaneous application of the multichannel principle and the partial flow measurement method. Coriolis flowmeters and the differential pressure flowmeter are used as the main elements of the system. The proposed measurement system does not offer applications for gases with abundant drip humidity. The article provides information about the test results of the proposed invariant system. The estimation of the metrological characteristics of the invariant system when measuring the flow rate of wet gas is given. The obtained test results of the invariant wet gas flow rate measurement system are relevant for natural gas production, transportation, and storage facilities.

scholarly journals In situ noncontact measurement system and two-step compensation strategy for ultra-precision diamond machining

2018 ◽  
Vol 26 (23) ◽  
pp. 30724 ◽  
Author(s):  
Jun Yu ◽  
Zhengxiang Shen ◽  
Xiaoqiang Wang ◽  
Pengfeng Sheng ◽  
Zhanshan Wang
Keyword(s):  
Measurement System ◽  
Compensation Strategy ◽  
Noncontact Measurement ◽  
Diamond Machining ◽  
Ultra Precision
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