A 3D metrology system for the GMT

2016 ◽  
Author(s):  
A. Rakich ◽  
Lee Dettmann ◽  
S. Leveque ◽  
S. Guisard
Keyword(s):  
3D Metrology ◽  
Metrology System

3D metrology system based on a bi-directional OLED microdisplay

2012 ◽  
Author(s):  
Constanze Grossmann ◽  
Ute Gawronski ◽  
Martin Breitbarth ◽  
Gunther Notni ◽  
Andreas Tünnermann
Keyword(s):  
3D Metrology ◽  
Metrology System

3D metrology system with internal calibration

2010 ◽  
Author(s):  
D. Härter ◽  
C. Müller ◽  
H. Reinecke
Keyword(s):  
Internal Calibration ◽  
3D Metrology ◽  
Metrology System

Disparity pattern-based autostereoscopic 3D metrology system for in situ measurement of microstructured surfaces

2015 ◽  
Vol 40 (22) ◽  
pp. 5271 ◽  
Author(s):  
Da Li ◽  
Chi Fai Cheung ◽  
MingJun Ren ◽  
David Whitehouse ◽  
Xing Zhao
Keyword(s):  
In Situ Measurement ◽  
Microstructured Surfaces ◽  
3D Metrology ◽  
Metrology System

AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

2014 ◽  
Vol 20 (S3) ◽  
pp. 1112-1113 ◽  
Author(s):  
Aaron Lewis ◽  
A. Komissar ◽  
A. Ignatov ◽  
Oleg Fedoroyov ◽  
E. Maayan ◽  
...  
Keyword(s):  
3D Metrology

Active figure maintenance control using an optical truss laser metrology system for a space-based far-IR segmented telescope

1992 ◽  
Author(s):  
Kenneth H. Lau ◽  
William G. Breckenridge ◽  
Noble M. Nerheim ◽  
David C. Redding
Keyword(s):  
Laser Metrology ◽  
Metrology System
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