Nanoimprint system development and status for high-volume semiconductor manufacturing

2015 ◽  
Author(s):  
Kazunori Iwamoto ◽  
Takehiko Iwanaga ◽  
S. V. Sreenivasan ◽  
Junji Iwasa
Keyword(s):  
Semiconductor Manufacturing ◽  
System Development ◽  
High Volume

Nanoimprint system development and status for high-volume semiconductor manufacturing

2016 ◽  
Author(s):  
Tsuneo Takashima ◽  
Yukio Takabayashi ◽  
Naosuke Nishimura ◽  
Keiji Emoto ◽  
Takahiro Matsumoto ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
System Development ◽  
High Volume

Nanoimprint system development and status for high volume semiconductor manufacturing

2016 ◽  
Author(s):  
Hiromi Hiura ◽  
Yukio Takabayashi ◽  
Tsuneo Takashima ◽  
Keiji Emoto ◽  
Jin Choi ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
System Development ◽  
High Volume

Nanoimprint system development for high-volume semiconductor manufacturing the and status of overlay performance

2017 ◽  
Author(s):  
Yukio Takabayashi ◽  
Mitsuru Hiura ◽  
Hiroshi Morohoshi ◽  
Nobuhiro Kodachi ◽  
Tatsuya Hayashi ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
System Development ◽  
High Volume

High Volume Semiconductor Manufacturing Using Nanoimprint Lithography

2020 ◽  
Author(s):  
Yukio Takabayashi ◽  
Takehiko Iwanaga ◽  
Mitsuru Hiura ◽  
Hiroshi Morohoshi ◽  
Tatsuya Hayashi ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Semiconductor Manufacturing ◽  
High Volume

Progress in nanoimprint wafer and mask systems for high volume semiconductor manufacturing

2017 ◽  
Author(s):  
Mitsuru Hiura ◽  
Tatsuya Hayashi ◽  
Atsushi Kimura ◽  
Yoshio Suzaki ◽  
Kohei Imoto ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
High Volume

High-power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing

2017 ◽  
Author(s):  
Takashi Saitou ◽  
Taku Yamazaki ◽  
Hiroaki Nakarai ◽  
Tamotsu Abe ◽  
Krzysztof M. Nowak ◽  
...  
Keyword(s):  
High Power ◽  
Semiconductor Manufacturing ◽  
High Volume

Improved particle control for high volume semiconductor manufacturing for nanoimprint lithography

2017 ◽  
Author(s):  
Masami Yonekawa ◽  
Takahiro Nakayama ◽  
Kazuki Nakagawa ◽  
Toshihiro Maeda ◽  
Yoichi Matsuoka ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Semiconductor Manufacturing ◽  
High Volume

High volume semiconductor manufacturing using nanoimprint lithography

2018 ◽  
Author(s):  
Zenichi Hamaya ◽  
Junichi Seki ◽  
Toshiya Asano ◽  
Keita Sakai ◽  
Ali Aghili ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Semiconductor Manufacturing ◽  
High Volume

Nanoimprint system alignment and overlay improvement for high volume semiconductor manufacturing

2020 ◽  
Author(s):  
Atsushi Kimura ◽  
Yukio Takabayashi ◽  
Takehiko Iwanaga ◽  
Mitsuru Hiura ◽  
Keita Sakai ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
High Volume
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