Quality control of embedded-type phase-shift mask

1995 ◽  
Author(s):  
Yoshiro Yamada ◽  
Kazuaki Chiba ◽  
Eisei Karikawa ◽  
Hiromasa Unno ◽  
Yasutaka Kikuchi ◽  
...  
Keyword(s):  
Quality Control ◽  
Phase Shift ◽  
Type Phase ◽  
Embedded Type ◽  
Phase Shift Mask

Application of Alternating-Type Phase Shift Mask to Polysilicon Level for Random Logic Circuits

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6779-6784 ◽  
Author(s):  
Gérald Galan ◽  
Frédéric Lalanne ◽  
Patrick Schiavone ◽  
Jean-Marc Temerson
Keyword(s):  
Phase Shift ◽  
Logic Circuits ◽  
Type Phase ◽  
Phase Shift Mask

Self-aligned rim-type phase-shift mask fabrication by backside exposure

1993 ◽  
Author(s):  
David S. O'Grady ◽  
Stan P. Bajuk ◽  
Edward T. Smith
Keyword(s):  
Phase Shift ◽  
Type Phase ◽  
Phase Shift Mask ◽  
Mask Fabrication

Monte-Carlo-Based Automatic Design of Chromeless Phase Shift Mask

2004 ◽  
Vol 43 (2) ◽  
pp. 514-517
Author(s):  
Jai-Cheol Lee ◽  
Yong-Ho Oh ◽  
Sungwoo Lim ◽  
Chun Soo Go ◽  
Sung Su Roh
Keyword(s):  
Monte Carlo ◽  
Phase Shift ◽  
Automatic Design ◽  
Phase Shift Mask

Preliminary study of 65 nm node alternating phase-shift mask fabrication

2002 ◽  
Author(s):  
Kouji Hosono ◽  
Naoyuki Ishiwata ◽  
Satoru Asai ◽  
Hiroshi Maruyama ◽  
Yutaka Miyahara ◽  
...  
Keyword(s):  
Phase Shift ◽  
Preliminary Study ◽  
Phase Shift Mask ◽  
Alternating Phase Shift Mask ◽  
Mask Fabrication

Application of alternating phase shift mask to device fabrication

1995 ◽  
Author(s):  
Sunggi Kim ◽  
Sang-Gyun Woo ◽  
Woo-Sung Han ◽  
Young-Bum Koh ◽  
Moon-Yong Lee
Keyword(s):  
Phase Shift ◽  
Device Fabrication ◽  
Phase Shift Mask ◽  
Alternating Phase Shift Mask

Second level exposure for phase shift mask applications using an SLM-based DUV mask writer

2005 ◽  
Author(s):  
Mahesh Chandramouli ◽  
Bob Olshausen ◽  
Yulia Korobko ◽  
Sven Henrichs ◽  
Ping Qu ◽  
...  
Keyword(s):  
Phase Shift ◽  
Phase Shift Mask

Primary processes in e-beam and laser lithographies for phase-shift mask manufacturing II

1993 ◽  
Author(s):  
Masa-aki Kurihara ◽  
Masumi Arai ◽  
Hiroshi Fujita ◽  
Hisashi Moro-oka ◽  
Yoichi Takahashi ◽  
...  
Keyword(s):  
Phase Shift ◽  
Phase Shift Mask
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