Full chip two-layer CD and overlay process window analysis

2015 ◽  
Author(s):  
Rachit Gupta ◽  
Shumay Shang ◽  
John Sturtevant
Keyword(s):  
Process Window ◽  
Window Analysis

Hot-Spot Detection and Correction Using Full-Chip-Based Process Window Analysis

2008 ◽  
Vol 47 (6) ◽  
pp. 4893-4897
Author(s):  
Sang-Wook Kim ◽  
Sung-Soo Suh ◽  
Yong-Jin Chun ◽  
Young-Chang Kim ◽  
Suk-Joo Lee ◽  
...  
Keyword(s):  
Hot Spot ◽  
Process Window ◽  
Window Analysis ◽  
Spot Detection

Process window analysis of ductile mode machining of binderless tungsten carbide molds

2018 ◽  
Author(s):  
Marius Doetz ◽  
Ji Eun Lee ◽  
Olaf Dambon ◽  
Fritz Klocke ◽  
Eckhard Langenbach ◽  
...  
Keyword(s):  
Tungsten Carbide ◽  
Process Window ◽  
Window Analysis ◽  
Ductile Mode

Hot-spot detection and correction using full-chip based process window analysis

2007 ◽  
Author(s):  
Sang-Wook Kim ◽  
Sung-Soo Suh ◽  
Young-Chang Kim ◽  
Suk-Joo Lee ◽  
Jung-Hyeon Lee ◽  
...  
Keyword(s):  
Hot Spot ◽  
Process Window ◽  
Window Analysis ◽  
Spot Detection

Process window analysis of algorithmic assist feature placement options at the 2X nm node DRAM

2013 ◽  
Author(s):  
Jinhyuck Jeon ◽  
Shinyoung Kim ◽  
Jookyoung Song ◽  
Chanha Park ◽  
Hyunjo Yang ◽  
...  
Keyword(s):  
Process Window ◽  
Window Analysis

Robust approach to determine the optimized illumination condition using process window analysis

2007 ◽  
Author(s):  
Yong-Jin Chun ◽  
Sung-Woo Lee ◽  
Sooryong Lee ◽  
Young-Mi Lee ◽  
Sungsoo Suh ◽  
...  
Keyword(s):  
Process Window ◽  
Illumination Condition ◽  
Robust Approach ◽  
Window Analysis
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